Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems

Kouh, Taejoon; Karabacak, Devrez M.; Kim, D. H.; Ekinci, K. L.

doi:10.1063/1.1843289

Cited by 81 publications

(85 citation statements)

References 12 publications

(15 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We actuated the out-of-plane modes of the resonators electrostatically and measured the displacements optically [12]. All measurements were performed under linear drive; moreover, the results remained independent of the rms displacement amplitudes of 1-10 nm as confirmed by Michelson interferometry.…”

mentioning

confidence: 94%

See 1 more Smart Citation

High-Frequency Nanofluidics: An Experimental Study Using Nanomechanical Resonators

2007

Self Cite

View full text Add to dashboard Cite

Here we apply nanomechanical resonators to the study of oscillatory fluid dynamics. A highresonance-frequency nanomechanical resonator generates a rapidly oscillating flow in a surrounding gaseous environment; the nature of the flow is studied through the flow-resonator interaction. Over the broad frequency and pressure range explored, we observe signs of a transition from Newtonian to non-Newtonian flow at ωτ ≈ 1, where τ is a properly defined fluid relaxation time. The obtained experimental data appears to be in close quantitative agreement with a theory that predicts purely elastic fluid response as ωτ → ∞.

show abstract

mentioning

confidence: 94%

“…In order to cover a broad frequency range, we fabricated silicon doubly-clamped beam resonators with varying dimensions w × h × l displayed in Table I using standard techniques [12]. To further extend the frequency range, we employed fundamental and first harmonic modes of two commercial silicon AFM cantilevers (Table I).…”

mentioning

confidence: 99%

High-Frequency Nanofluidics: An Experimental Study Using Nanomechanical Resonators

2007

Self Cite

View full text Add to dashboard Cite

show abstract

“…82,84 Recently, optical interferometry techniques, in particular path stabilized Michelson interferometry and Fabry-Pérot interferometry, have been extended into the NEMS domain. [85][86][87][88][89] Figure 9 shows a typical room temperature optical interferometer setup. In path stabilized Michelson interferometry, a tightly focused laser beam reflects from the surface of a NEMS device and interferes with a reference beam.…”

Section: Type Of Noisementioning

confidence: 99%

Nanoelectromechanical Systems

Roukes¹

2005

Microsystems

100

View full text Add to dashboard Cite

Nanoelectromechanical systems ͑NEMS͒ are drawing interest from both technical and scientific communities. These are electromechanical systems, much like microelectromechanical systems, mostly operated in their resonant modes with dimensions in the deep submicron. In this size regime, they come with extremely high fundamental resonance frequencies, diminished active masses, and tolerable force constants; the quality ͑Q͒ factors of resonance are in the range Q ϳ 10 3 -10 5 -significantly higher than those of electrical resonant circuits. These attributes collectively make NEMS suitable for a multitude of technological applications such as ultrafast sensors, actuators, and signal processing components. Experimentally, NEMS are expected to open up investigations of phonon mediated mechanical processes and of the quantum behavior of mesoscopic mechanical systems. However, there still exist fundamental and technological challenges to NEMS optimization. In this review we shall provide a balanced introduction to NEMS by discussing the prospects and challenges in this rapidly developing field and outline an exciting emerging application, nanoelectromechanical mass detection.

show abstract

“…In comparison, R 0 values in the range of 0.2 m −1 were reported recently for an optical technique applicable for in-plane vibration detection, 6 and 0.01 m −1 for an optical technique applicable for out-ofplane vibration detection. 7 Note that influences of beam bending were disregarded in the analysis of the responsivity. In general, an enhanced responsivity can be expected for improved modal overlap for the two waveguides.…”

Section: -mentioning

confidence: 99%

“…5 Optical motion detection techniques have the inherent advantage that optical signals can be communicated with very large bandwidth. [6][7][8] Unfortunately, for conventional optical techniques, diffraction effects limit the attainable detection limits when the mechanical devices are scaled. It has been anticipated that these issues can be overcome by integration of mechanical sensors with nanophotonics and by exploiting optical near-field effects.…”

mentioning

confidence: 99%

Detection of nanomechanical motion by evanescent light wave coupling

Vlaminck

Roels

Taillaert

et al. 2007

Applied Physics Letters

View full text Add to dashboard Cite

The authors demonstrate a technique allowing sensitive nanomechanical motion detection based on the evanescent light wave coupling between two photonic nanowires. Any relative motion between the nanowires results in a change in light coupling, providing a means of registering motion. The in-plane vibrations of a 220 nmϫ 400 nmϫ 10 m nanomechanical resonator were recorded using this method. An analysis of the sensitivity reveals the potential of this integrated technique to provide fast and sensitive motion detection. © 2007 American Institute of Physics. ͓DOI: 10.1063/1.2746067͔ Nanoelectromechanical systems ͑NEMSs͒ have received great attention in recent years. Most research has focused on resonant devices for sensor applications. 1,2 Through scaling of the mechanical sensing element from the micron-to the nanoscale, researchers were able to improve the detection limits in force and mass sensing drastically. Devices sensitive enough to measure the magnetic moment of a single electron spin 3 or to perform zeptogram scale mass sensing 4 have resulted from efforts in scaling. A central problem in the development of even more sensitive mechanical sensors is the fast and high-precision detection of motion. In many cases, the performance of the sensor is restricted by the efficiency of the motion detection method employed, more so than by the inherent capabilities of the mechanical element. Much research has been devoted to solving this problem and a myriad of optical and electronic techniques has been developed. 5 Optical motion detection techniques have the inherent advantage that optical signals can be communicated with very large bandwidth. 6-8 Unfortunately, for conventional optical techniques, diffraction effects limit the attainable detection limits when the mechanical devices are scaled. It has been anticipated that these issues can be overcome by integration of mechanical sensors with nanophotonics and by exploiting optical near-field effects. 1,5 Recently, it was shown that motion of micron-scale devices can be monitored through changes in end-to-end alignment of optical waveguides. [9][10][11] In this letter, we propose an integrated and near-field optical motion detection technique that exploits near-field optical evanescent-wave coupling. We demonstrate that the technique works efficiently for nanoscale mechanical resonators, with greater sensitivity than conventional optical techniques.The approach offers potential for applications where robust and sensitive measurement of motion is required and applications requiring remote detection or detection of motion in harsh environments. The integration of the device with photonic circuitry reduces the complexity of addressing large arrays of devices.The detection of nanomechanical motion is achieved through the near-field coupling of light from a photonic waveguide to a mechanical resonator. The mechanical resonator acts as a photonic waveguide; when the evanescent tails of the guided modes of the resonator and waveguide overlap, photons tunnel from one wavegu...

show abstract

Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems

Cited by 81 publications

References 12 publications

High-Frequency Nanofluidics: An Experimental Study Using Nanomechanical Resonators

High-Frequency Nanofluidics: An Experimental Study Using Nanomechanical Resonators

Nanoelectromechanical Systems

Detection of nanomechanical motion by evanescent light wave coupling

Contact Info

Product

Resources

About