The mechanism of coating induced polarization state variation is analysed by the
Jones matrix. Pauli spin matrices are used to establish the relationship between
coating induced polarization state variation and polarization aberrations.
To reduce coating induced polarization aberrations, we propose that
δ = 0 and
Ts = Tp
at arbitrary incident angle should be appended as two additional optimization goals of
optical coating design when the requirements of transmittance are met. Two typical
anti-reflection (AR) coatings are designed and the polarization state variation induced by
them is simulated. The MTF (modulation transfer function) calculated by polarization ray
tracing is applied to evaluate the polarization aberrations of the practical lithography
objective system with the two AR coatings. All the obtained results show that the
coating induced polarization aberrations can be reduced by optimizing the angle
dependent properties of the optical coating without additional optical elements.