Differential contrast imaging of secondary electron signals in cryo‐field‐emission scanning electron microscopy

Abstract

Summary: Low-temperature scanning electron microscopy (LTSEM) is limited in resolution and image quality by charging of frozen hydrated samples and collection deficiencies of secondary electron signal contrasts. We measured and corrected both effects using differential hysteresis processing (DHP) of LTSEM images, scanned at 15-bit from 5 × 4 inch Polaroid negatives. Bulk charging produced a major contrast component equal to 44-87% of the intensity range of the image. The strong charging contrast reduced the local highresolution signal contrasts to an unrecognizable level. Segmentation and imaging of the unaffected surface contrasts produced high-quality images of high contrast from metal-coated samples as well as from uncoated samples. The differential contrast imaging can be used for control of the sequential etching of ice from the non metal-coated sample as well as improved LTSEM imaging of the finally coated sample.