Different Shear Height Stress Evaluation on -0.7Cu Based Lead Free Solder

Retnasamy, Vithyacharan; Sauli, Zaliman; Nor, N. I. M.; Palianysamy, Moganraj; Ismail, Rizalafande Che; Say, Ong Tee; Kamarudin, Hussin

doi:10.1109/uksim.2013.130

Cited by 2 publications

(3 citation statements)

References 14 publications

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“…The DOE technique is a low cost and quick method to understand and optimize variables of the RIE process in this work. The main effect is used to estimate and analyze the effect of factor [5][6][7][8]. The following equation of DOE: Main effect of a factor = Average response at high level -Average response at low level [5][6][7][8] The results of grain size after RIE process is measured by using AFM and light reflectance on surface of specimen is analyzed by using Lambda 950 were shown in Table 1.…”

Section: Resultsmentioning

confidence: 99%

“…The main effect is used to estimate and analyze the effect of factor [5][6][7][8]. The following equation of DOE: Main effect of a factor = Average response at high level -Average response at low level [5][6][7][8] The results of grain size after RIE process is measured by using AFM and light reflectance on surface of specimen is analyzed by using Lambda 950 were shown in Table 1. From the Table 1, test specimen 14 has the highly value of grain size compared to other specimen which is 112800.00 nm.…”

Section: Resultsmentioning

confidence: 99%

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Metallic Layer Reflectance Analysis Using Design of Experiment

Sauli

Retnasamy

Say

et al. 2014

AMR

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In this work, a Full Factorial Experimentation technique, Design of Experiment (DOE) was developed and used to control the parameter of RIE (Reactive Ion Etching) process on a silicon wafer with aluminium layer. The objective of this work is to examine the Reactive Ion Etching (RIE) process on aluminium with different parameter, which are temperature, vacuum, RF (Radio Frequency) power and gas flow. Then, AFM (Atomic Force Microscope) and Lambda 950 spectrometer are used to analyse the grain size and light reflectance on the test specimen after RIE process. From the result, all four parameters of RIE were give an effect on grain size and surface reflectance on the test specimen. The parameter of gas flow is the most influence factor for grain size and surface reflectance in RIE process for aluminium layer compared to other parameters in this work.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Metallic Layer Reflectance Analysis Using Design of Experiment

Sauli

Retnasamy

Say

et al. 2014

AMR

View full text Add to dashboard Cite

show abstract

“…The DOE is a low cost and quick method to understand and optimize variables of the RIE process in this study. The main effect is used following equation to estimate the effect of factor [6,7]: Main effect of a factor = Average response at high level -Average response at low level [6,7] The effects of temperature, vacuum, RF power and gaseous on surface roughness are calculated and the results are -4.184, 0.009, 3.534 and 16.701. From the results, effect of temperature is negative when the average surface roughness at low level is higher than average…”

Section: Resultsmentioning

confidence: 99%

Analysis on Surface Roughness and Surface Reflectance through DOE

Sauli

Retnasamy

Say

2014

AMM

View full text Add to dashboard Cite

The Lambda 950 spectrometers are designed to investigate and examine surface coating on test specimen by using the light source. The objective of this research is to investigate the factors that affect the surface roughness and reflectance after different parameter of Reactive Ion Etching (RIE) process. There are four parameters to control the RIE process which is temperature, vacuum, RF (Radio Frequency) power and gas flow. The parameters in this research are using a Full Factorial Experimentation technique, the Design of Experiment (DOE). The AFM (Atomic Force Microscope) and Lambda 950 spectrometer are used to analyse the surface roughness and light reflectance of the specimen. The result showed all four parameters of RIE were give effect on surface roughness and surface reflectance. The parameter of gas flow is the most influence factor for surface roughness and surface reflectance compared to other parameters in this work.

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Different Shear Height Stress Evaluation on -0.7Cu Based Lead Free Solder

Cited by 2 publications

References 14 publications

Metallic Layer Reflectance Analysis Using Design of Experiment

Metallic Layer Reflectance Analysis Using Design of Experiment

Analysis on Surface Roughness and Surface Reflectance through DOE

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