Different pixel patterns of Si-based far infrared bolometers

Juang, Feng-Renn; Yeh, Wen–Kuan; Chen, Wei-Chih; Chung, Ming-Feng

doi:10.23919/snw.2017.8242321

2017 Silicon Nanoelectronics Workshop (SNW) 2017

DOI: 10.23919/snw.2017.8242321

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Different pixel patterns of Si-based far infrared bolometers

Feng-Renn Juang

Wen–Kuan Yeh

Wei-Chih Chen

et al.

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Different pixel patterns of Si-based far infrared bolometers

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