1996
DOI: 10.1063/1.117826
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Dielectric response of thick low dislocation-density Ge epilayers grown on (001) Si

Abstract: Spectroscopic ellipsometry was used to measure the dielectric functions of epitaxial and bulk Ge at photon energies from 1.5 to 5.2 eV. The epitaxial Ge was grown at 400°C by molecular beam epitaxy on ͑001͒ Si substrates. The optical response and the interband critical-point parameters of Ge on Si were found to be indistinguishable from that of bulk single crystal Ge, indicating high optical quality. Dislocation density measurements using an iodine etch verified low surface defect densities. We conclude that e… Show more

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Cited by 15 publications
(8 citation statements)
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“…This might be attributed to the presence of threading dislocations and small compressive strain in the nearly relaxed films. 27,30 The phase angles for E 1 and E 1 þ D 1 obtained for the film are in good agreement with the bulk values. We notice that the magnitude of phase angle for E 1 is slightly greater than that for E 1 þ D 1 for both our film and bulk, consistent with the finding for bulk InSb 11 at room temperature.…”
Section: Resultssupporting
confidence: 78%
“…This might be attributed to the presence of threading dislocations and small compressive strain in the nearly relaxed films. 27,30 The phase angles for E 1 and E 1 þ D 1 obtained for the film are in good agreement with the bulk values. We notice that the magnitude of phase angle for E 1 is slightly greater than that for E 1 þ D 1 for both our film and bulk, consistent with the finding for bulk InSb 11 at room temperature.…”
Section: Resultssupporting
confidence: 78%
“…The error in the shift determined from this procedure is probably quite large, but it is apparent that a downshift of the E 1 and E 1 + Δ 1 transitions takes place. Similarly we observe a red shift of the E 2 critical point of about 50 meV from a derivative analysis of spectroscopic ellipsometry data . These data suggest that the band gap of the alloys is also reduced relative to Ge, although it is not possible from this information to determine whether the expected indirect-direct transition has taken place.…”
Section: Resultsmentioning
confidence: 96%
“…Broadening parameter for E 1 is also found to be sensitive to the dislocation density in group-IV alloys. 24 Pseudomorphic SiGeC alloys which have lower dislocation density than relaxed alloys show narrow broadening parameters. Phase angle is related to the geometrical nature of a critical point and is also assumed to capture the many body effects.…”
Section: Introductionmentioning
confidence: 99%