Dielectric Properties of Ti, TiO2 and TiN from 1.5 to 60 eV Determined by Reflection Electron Energy Loss Spectroscopy (REELS) and Ellipsometry

Fuentes, G.G.; Mancheño, I.G.; Balbás, F.; Quirós, C.; Trigo, J.F.; Yubero, F.; Elizalde, E.; Sanz, J.M.

doi:10.1002/(sici)1521-396x(199909)175:1<429::aid-pssa429>3.3.co;2-y

phys. stat. sol. (a)

1999

DOI: 10.1002/(sici)1521-396x(199909)175:1<429::aid-pssa429>3.3.co;2-y

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Dielectric Properties of Ti, TiO2 and TiN from 1.5 to 60 eV Determined by Reflection Electron Energy Loss Spectroscopy (REELS) and Ellipsometry

G.G. Fuentes¹,

I.G. Mancheño²,

F. Balbás³

et al.

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Dielectric Properties of Ti, TiO2 and TiN from 1.5 to 60 eV Determined by Reflection Electron Energy Loss Spectroscopy (REELS) and Ellipsometry

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