Abstract:Oxide thin films attracted significant attention because of their favorable responses, especially dielectric and stable electrical properties. In this study, nanocrystalline (Mg0.95Zn0.05)TiO3 (MZT) films are deposited on Pt/TiO2/SiO2/Si and quartz substrates by radio-frequency (RF) reactive magnetron sputtering. The effect of deposition gas ratio, i.e., the proportion of oxygen and argon (O2/Ar) on broad band and microwave dielectric properties and impedance spectroscopy of MZT films are investigated. The die… Show more
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