Dielectric losses and ac conductivity of Si–LiNbO3 heterostructures grown by the RF magnetron sputtering method

Иевлев, В. М.; Sumets, M.; Kostyuchenko, А. V.; Bezryadin, N. N.

doi:10.1007/s10854-012-0990-4

Cited by 18 publications

(10 citation statements)

References 14 publications

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“…1 that single-phase h0001i textured polycrystalline LiNbO 3 films are formed on Si (001) substrates during the RFMS process under conditions 1, and the film's texture is a result of the ion-assisted process. This fact is in a good agreement with our previous results [14]. Moreover, Fig.…”

Section: Resultssupporting

confidence: 94%

Sputtering condition effect on structure and properties of LiNbO3 films

Sumets

Kostyuchenko

Иевлев

et al. 2015

J Mater Sci: Mater Electron

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Polycrystalline LiNbO 3 films were grown on various substrates by the radio-frequency magnetron sputtering (RFMS) method and ion-beam sputtering (IBS) method at different sputtering conditions. Films formed on the substrates situated within erosion zone (plasma effect) manifested textured structure. When plasma effect became insignificant only LiNbO 3 films with random size orientation were formed during the RFMS process and IBS process with an increase in the size of the crystallites. Reactive gas pressure as part of plasma effect has a profound effect on the films' properties. When gas pressure was increased greatly, grain size declined two fold and the average surface roughness of the grown films doubled. At the higher gas pressure Li-poor phase LiNb 3 O 8 appeared along with LiNbO 3 during the growth process. As a result, the film texture disappeared. Single phase LiNbO 3 films with two-axes (epitaxial) texture are formed on (111)Ag epitaxial film during the RFMS process at the ion assisted conditions.

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Section: Resultssupporting

confidence: 94%

Sputtering condition effect on structure and properties of LiNbO3 films

Sumets

Kostyuchenko

Иевлев

et al. 2015

J Mater Sci: Mater Electron

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“…Because of its remarkable linear and nonlinear optical properties, chemical and mechanical stability makes lithium niobate (LN) an attractive host material for application in photonic crystal devices [4]. Moreover LN has high electro-optical coefficient and low optical losses thus offers suitability in optical communication systems, which are widely used for applications in microwave telecommunications, memory units, electro optics, modulators, optical switches, waveguides, beam deflectors, second harmonic generation, surface acoustic waves (SAW) devices, parametric optical converters and data transmission [5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

“…Optical waveguides comprised of hetero-materials efficiently confine propagating light because of large difference in refractive indices between the film and the substrate [13]. Therefore, LiNbO3s have been grown by several techniques including liquid-phase epitaxy [14], Ion Beam Sputtering [15], RF magnetron sputtering [16], molecular beam epitaxy [17], metalorganic chemical vapor deposition [18], pulsed-laser deposition (PLD) [19], thermal plasma spray chemical vapor deposition [20], electron-cyclotron-resonance (ECR) plasma sputtering [21], electron beam irradiation [22] and pulsed laser ablation (PLA) [23].…”

Section: Introductionmentioning

confidence: 99%

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

et al. 2017

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Abstract. This paper focuses on the structure and optical properties of Lithium niobate (LN) deposited on quartz substrate by sol-gel method. The solution was prepared at different molarity concentration and annealed at 500 o C. The LNs were analyzed by UV-visible, X-ray diffraction (XRD) and Scanning Electron Microscope (SEM). The results show that as the molar concentration increases, the films crystallization becomes more atomically distributed and the energy band gap approaches 4 eV. Transmission spectra were taken in the wavelength range of 400-1100 nm. Hexagonal structure was observed with good atoms distribution and homogeneous crystallization. There were two phases of LNs recorded in this work.

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“…Analysis of the X-ray diffraction results for LN2-T sample demonstrates (see Fig. 6) that TA of Si-LiNbO 3 heterostructures triggers recrystallization of the films with an increase of the average grain size up to 1.5 times (about 70 nm) and weakens of the texture compared with as-grown films [13,17]. It is important to emphasize, that TA of the as grown LiNbO 3 films leads to the formation of LiNb 3 O 8 phase.…”

Section: Resultsmentioning

confidence: 99%

“…Moreover, TA induces increasing the porosity of film surface [10] along with decreasing the film transmittance. At the same time, TA brings about a surface transformation processes like raise in the surface roughness, weakening the film texture [13] as well as formation of the surface layers influencing the ferroelectric properties of treated heterostructures. Also, TA improves a O/Nb ratio in the as-grown LiNbO 3 films [14].…”

Section: Introductionmentioning

confidence: 99%

Influence of thermal annealing on structural properties and oxide charge of LiNbO3 films

Sumets

Kostyuchenko

Иевлев

et al. 2015

J Mater Sci: Mater Electron

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C-oriented polycrystalline lithium niobate (LiNbO 3 ) films have been deposited on Si substrate by the radio-frequency magnetron sputtering method in an Ar atmosphere and Ar ? O 2 gas mixture. All as-grown LiNbO 3 films manifested positive fixed oxide charge regardless of the sputtering conditions. Donor centers are formed in Si substrate because of diffusion of O 2 molecules during sputtering process. Thermal annealing (TA) of the deposited films leads to increase in the surface roughness and grain size as well as formation of LiNb 3 O 8 phase in the studied films. Also, TA resulting in the decline of positive oxide charge due to the diffusion of oxygen molecules into LiNbO 3 films from air and out-diffusion from Si substrate.

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Dielectric losses and ac conductivity of Si–LiNbO3 heterostructures grown by the RF magnetron sputtering method

Cited by 18 publications

References 14 publications

Sputtering condition effect on structure and properties of LiNbO3 films

Sputtering condition effect on structure and properties of LiNbO3 films

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

Influence of thermal annealing on structural properties and oxide charge of LiNbO3 films

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