Die Struktur epitaktisch aufgedampfter Goldfilme

Abstract

Structure of Epitaxialty Grown Gold Films. I. Analysis of X-Ray Diffraction PatternsGold films of 400 Ä thickness were evaporated under UHV-conditions on (111)-, (110)-and (100)-oriented silicon substrates and were subsequently investigated by x-ray diffraction. Mainly the influence of orientation and cleanliness of the substrate on film structure was studied.Informations on the orientation and size of the crystallites as well as on lattice distortions were obtained by analysing intensity, angular displacement and width of the diffraction peaks. It is found that the gold films show a preferred (111)-orientation in all cases; only the degree of orientation changes with the pretreatment of the substrate. The size of the (111)-oriented crystallites corresponds to the film thickness, and a noticeable density of intrinsic stacking faults can be detected.

X-ray diffraction

“…Spencer et al ( 144) have shown that thin films deposited from a beam of carbon ions consist of polycrystalline cubic diamond with a particle size of 50 to 100 Á. Evaporated films of stearic acid on glass substrates were found to have a monoclinic structure in comparison to Langmuir-Blodgett films which have a hexagonal close-packed structure (2). The degree of crystallite orientation of epitaxially grown gold films of 400 A thickness was found to be strongly related to the cleanliness of the substrate surface (50). Kishino and co-workers (82) measured the half-width and peak intensity of a rocking curve obtained from polycrystalline silicon deposited on sapphire using soft x-rays generated from a titanium target x-ray tube.…”