2003
DOI: 10.1002/ciuz.200300280
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Die Herstellung von Reinstsiliciumscheiben: Mehr Chemie als man glaubt

Abstract: Einkristalline Halbleiterscheiben aus Silicium stellen die Grundlage für mikroelektronische Bauelemente dar. Die Umwandlung des Ausgangsmaterials Quarz in eine epitaktisch beschichtete 300‐mm‐Scheibe umfasst eine Vielzahl von Prozessschritten, die teilweise deutlich von chemischen Verfahren geprägt sind. Der vorliegende Aufsatz führt in die Herstellung von Halbleitersilicium sowie die Verfahren Ätzen, Polieren, Reinigen und Epitaxie ein. Was diesen Technologiezweig auszeichnet, sind die extremen Anforderungen … Show more

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Cited by 10 publications
(2 citation statements)
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“…Dichlorosilylene (SiCl 2 ) is known as the key species in the production of ultra‐pure elemental silicon from HSiCl 3 . Like HSiCl 3 , Si 2 Cl 6 is an important laboratory source of SiCl 2 .…”
Section: Resultsmentioning
confidence: 99%
“…Dichlorosilylene (SiCl 2 ) is known as the key species in the production of ultra‐pure elemental silicon from HSiCl 3 . Like HSiCl 3 , Si 2 Cl 6 is an important laboratory source of SiCl 2 .…”
Section: Resultsmentioning
confidence: 99%
“…While trichlorosilane and monosilane are produced on a large scale and are relatively cheap, higher silanes need to be synthesized beforehand, sometimes at great expense. Some disilanes, such as hexachlorodisilane, pentachlorodisilane or various organochlorodisilanes, are by‐products of the Siemens [92] or Müller‐Rochow processes [93] . However, there are several methods for the direct preparation of higher silanes or the targeted construction and modification of silicon frameworks [94,70,41] .…”
Section: Synthesis Of Hydrogenated and Chlorinated Oligosilanesmentioning
confidence: 99%