Perfluorinated cyclic ethers represent an interesting class of molecules to use as dielectric gases for electrical insulation. Measurements of the two compounds 4,4,5,5-Tetrachloro-2,2-difluoro-1,3-dioxolane (c-C 3 Cl 4 F 2 O 2 , CAS 87075-01-2) and Octafluoro-1,4-dioxane (c-C 4 F 8 O 2 , CAS 32981-22-9) in a Pulsed Townsend Experiment are presented, their ionization and attachment rate coefficients are obtained and their electron attachment cross sections are estimated. Both gases have a high critical electric field strength of about 3.5 and 1.3 times the one of SF 6 , respectively, which is presumably due to very high electron attachment cross sections in the range from 2 − 4 eV. In particular, for cC 3 Cl 4 F 2 O 2 the values appear to be very close to the S-wave scattering limit around 3 eV. Based on these results, we recommend the two analogous compounds Perfluoro-1,3-dioxolane (c-C 3 F 6 O 2 , CAS 21297-65-4) and Perfluoro-oxetane (c-C 3 F 6 O, CAS 425-82-1) for further research for the use as insulation and refrigerant gases, since they are chemically comparable, presumably environmentally friendly, and have high vapor pressures.