Diamond SAW filter for 2.488 Gbps retiming

Nakahata, H.; Kitabayashi, H.; Hachigo, A.; Higaki, K.; Fujii, Satoshi; Uemura, T.; Shikata, Shinichi

doi:10.1109/ultsym.1998.762155

Cited by 10 publications

(7 citation statements)

References 8 publications

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“…SAW characteristics in ZnO/diamond and AlN/diamond structures were first calculated in 1989 and it was reported that high SAW velocities up to 10 000 m s −1 could propagate in these structures [3]. Considering the practical SAW application of diamond, CVD diamond films on substrates are preferable and the SAW characteristics in the multilayered structure consisting of a piezoelectric layer, a diamond layer and a substrate have been investigated [4][5][6][7][8][9][10][11][12][13][14]. In case of the layered structure, every SAW parameter depends on the thickness of each layer and the detailed calculations about their dependences were performed on ZnO/diamond/Si, SiO 2 /ZnO/diamond/Si, LiNbO 3 / diamond/Si and LiTaO 3 /diamond/Si structures [10].…”

Section: Basic Saw Parametersmentioning

confidence: 99%

“…In case of the layered structure, every SAW parameter depends on the thickness of each layer and the detailed calculations about their dependences were performed on ZnO/diamond/Si, SiO 2 /ZnO/diamond/Si, LiNbO 3 / diamond/Si and LiTaO 3 /diamond/Si structures [10]. Among these structures, the ZnO/diamond/Si and SiO 2 /ZnO/ diamond/Si were also experimentally investigated [12][13][14]. So far, ZnO is the only piezoelectric material which has been successfully fabricated on a diamond substrate as a film and shown its excellent piezoelectricity.…”

Section: Basic Saw Parametersmentioning

confidence: 99%

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Diamond-based surface acoustic wave devices

Nakahata¹,

Fujii²,

Higaki³

et al. 2003

Semicond. Sci. Technol.

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Research and development have been carried out to apply the CVD diamond film to surface acoustic wave (SAW) devices. Several kinds of layered structures including a diamond layer have been investigated by the calculations and experiments, and it has been found that the diamond SAW has great advantages for the application of high-frequency SAW devices with high SAW velocity, small temperature coefficient and high power durability. Practical SAW devices have been successfully fabricated with ZnO/diamond/Si and SiO 2 /ZnO/diamond/Si structures whose characteristics are superior to those with conventional SAW materials.

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Section: Basic Saw Parametersmentioning

confidence: 99%

Section: Basic Saw Parametersmentioning

confidence: 99%

Diamond-based surface acoustic wave devices

Nakahata¹,

Fujii²,

Higaki³

et al. 2003

Semicond. Sci. Technol.

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“…The effectiveness of this focus adjustment system was examined by using a two-port SAW resonator filter employing the SiO 2 /IDT/ZnO/diamond structure [11]. Fig.…”

Section: Measured Examplementioning

confidence: 99%

Focus adjustment system for a fast-scanning and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices

Kashiwa

Hashimoto

et al. 2009

2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum

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This paper describes a focus adjustment system particularly designed for the fast-mechanical-scanning and phase-sensitive laser probe for radio frequency (RF) surface and bulk acoustic wave (SAW/BAW) devices. When high spatial resolution is necessary for the observation, one needs an objective lens of large magnifying power with extremely shallow focal depth. Then a tiny inclination of a measurement device may cause severe defocus resulting in blurred images. We installed the focus adjustment system in the laser probe, and showed that even there is the inclination, high quality information of the wave field can be acquired without slowing down the scanning speed. The laser probe with the focus adjustment function is applied to the characterization of RF SAW devices operated in 2 GHz range. It is shown the spatial resolution better than 0.5 µm is obtainable.

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“…There are experimental as well as theoretical investigations on layered SAW filters with ZnO on a high velocity substrate. The electromechanical coupling and dispersion characteristics of SAW on layered structures with ZnO on sapphire or diamond have been calculated in [1][2][3], and experimental results on layered SAW filters were reported in [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Analysis of the frequency response of a dispersive IDT/ZnO/sapphire SAW filter using effective permittivity and the coupling of modes model

Chen

Wu²,

Chou

2003

J. Phys. D: Appl. Phys.

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In this paper, we propose a modified coupling of modes (COM) approach, which can be used in the practical design of a layered surface acoustic wave (SAW) filter. Unlike the half-space SAW filter, frequency dependences of the COM parameters are included by using the effective permittivity approach of surface waves. Owing to the introduction of the COM model, the effects of propagation loss, electrode reflections, electrical transduction, acoustic reception, thin film loss and the distributed finger capacitance can be taken into accounts in the frequency analysis of the layered SAW filter. The frequency response of a two-port 440 MHz IDT/ZnO/R-plane sapphire layered SAW filter is analysed and compared with the existing experimental results. Results have shown good agreement between the calculated and experimental frequency responses.

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Diamond SAW filter for 2.488 Gbps retiming

Cited by 10 publications

References 8 publications

Diamond-based surface acoustic wave devices

Diamond-based surface acoustic wave devices

Focus adjustment system for a fast-scanning and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices

Analysis of the frequency response of a dispersive IDT/ZnO/sapphire SAW filter using effective permittivity and the coupling of modes model

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