Diamond nucleation with dynamic magnetic field in hot filament chemical vapor deposition

Liu, Xuezhang; Wen, Kui; Duan, Xiaohua; Wang, Caihua; Long, Hangyu

doi:10.1016/j.vacuum.2023.112661

Cited by 3 publications

(1 citation statement)

References 37 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Due to its simple operation, low cost, and especially larger deposition area by expanding the arrangement of HFs, hotfilament CVD (HFCVD) is the most popular method employed for diamond deposition. [3,4] HFCVD depends on the catalytic decomposition of the precursor gas source into radical species by resistively heating a refractory metal filament to a temperature over the range of 2200-2600 °C. [5,6] Ta, W, and Re filaments have been used in the HFCVD.…”

Section: Introductionmentioning

confidence: 99%

The Stability of Straightened Ta Filament During Chemical Vapor Deposition of Diamond Film

Xiang,

Liu,

Liu

et al. 2024

Physica Status Solidi (a)

Self Cite

View full text Add to dashboard Cite

Maintaining the geometrical stability of hot filament is a challenge in chemical vapor deposition (CVD) over a larger area since deformation varies the distance between the filament and the substrate and, consequently, destroys the uniformity of diamond deposition. Herein, Ta filament is straightened with a tensile stress ranging from 4.40 to 11 MPa to suppress deformation, and the stability during the CVD process of diamond film is evaluated. Scanning electron microscopy and energy dispersive X‐ray are further utilized to investigate the morphological and structural evolutions of Ta filament. Results show that straightened Ta filament maintains geometrical stability without any visible deformation or breakage and uniform deposition of diamond film is obtained through Ta filament undergone a transformation from Ta to Ta2C and then to TaC. At high deposition pressure (7 kPa) or a low concentration of methane (1%), the straightened Ta filament goes through a moderate transformation, which implies the cracks caused by rough transformation can be avoided, thus prolonging the lifetime of straightened Ta filament. These works provide significant guidelines for the large‐scale manufacture of diamond deposition.

show abstract

Section: Introductionmentioning

confidence: 99%