Diamond-like carbon nanocomposite films

Chen, Liang Yih; Hong, Franklin Chau Nan

doi:10.1063/1.1576909

Cited by 70 publications

(26 citation statements)

References 15 publications

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“…The carbon-based coatings characterized by high hardness, low internal stress, good toughness, and low tribological moisture sensitivity are of continuously increased significance in the engineering applications [1][2][3][4][5][6]. Unfortunately, successful applications of carbon-based coatings have been considerably restricted by the high internal stress and poor adhesion to some substrates, especially, they could increase friction coefficient and quickly fail in high humid or aqueous environments [7][8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 98%

Achieving Low Tribological Moisture Sensitivity by a-C:Si:Al Carbon-based Coating

2011

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Owing to the requirements of the stable operation for mechanical components, the urgent challenges are to control tribological moisture sensitivity of protective coatings. In this letter, a-C:Si and a-C:Si:Al carbon-based coatings were successfully fabricated via magnetron sputtering Si, Al, and C. The microstructure, mechanical properties, and tribological moisture sensitivity of asfabricated carbon-based coatings were comparatively investigated. Results showed that the as-fabricated a-C:Si and a-C:Si:Al coatings were dominated by typical amorphous structure. The co-introduction of Al could effectively relax internal stress and improve adhesive strength as well as maintain the moderately high hardness for the asfabricated coating. The striking improvement in tribological moisture sensitivity of a-C:Si:Al carbon-based coating was mainly attributed to the superior mechanical properties and the formation of continuously compacted graphitized tribofilm under low relative humidity condition as well as low shear strength colloidal silica tribofilm under high relative humidity condition. The good balance between the hardness and toughness, low internal stress, and superior low tribological moisture sensitivity of a-C:Si:Al coating make it a good candidate for solid lubricating coating in engineering applications.

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Section: Introductionmentioning

confidence: 98%

Achieving Low Tribological Moisture Sensitivity by a-C:Si:Al Carbon-based Coating

2011

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“…DLC films have been caught more attention owing to their industrial applications such as excellent mechanical and tribological performance [4][5][6]. However, the true DLC films are very hard with high internal stresses, which tend to be brittle, have poor adhesion, and become unsuitable for highly loaded applications.…”

Section: Introductionmentioning

confidence: 99%

Nanocomposite Microstructure and Environment Self-Adapted Tribological Properties of Highly Hard Graphite-Like Film

Wang

et al. 2010

Tribol Lett

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Graphite-like carbon (GLC) nanocomposite films were fabricated by DC magnetron sputtering using high pure graphite target at ambient temperature. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) investigation showed that the as-deposited GLC films have high concentration of sp 2 -hybridized carbon. High-resolution transmission electron microscopy (HRTEM) images and selected area diffraction patterns (SADP) indicated a complex nanocomposite microstructure of the GLC films. As well as nanocrystalline graphite, a face-center cubic (fcc) diamond with a grain size in the range of 3-8 nm were dispersed in the amorphous carbon matrix inhomogenously and integrally. The nanocomposite GLC film had high hardness of 23 GPa, which was attributed to the mutual strengthening effect of nanoparticles and amorphous matrix. More importantly, the as-deposited nanocomposite GLC film exhibited excellent self-adapted tribological properties in different environments of ambient air, different relative humidity and water. The friction coefficients were 0.053 in ambient air and 0.046 in distilled water, while specific wear rates were 4.5 9 10 -16 m 3 N -1 m -1 and 1.6 9 10 -16 m 3 N -1 m -1 , respectively. The friction regimes and mechanisms in different environments were elaborated. This film is foreseen to high potential in protecting and solid lubricating material in humidity or water environment.

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“…The molecular formula of HMDSO gas precursor is (CH 3 ) 3 -Si-O-Si-(CH 3 ) 3 . 10,18 This precursor is a organosilicon compound prepared by the hydrolysis of trimethylsilyl chloride. Initially, we have used standard cleaning process to clean the substrates (pyrex glass slides).…”

Section: Methodsmentioning

confidence: 99%

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

et al. 2012

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Diamond-like nanocomposite (DLN) thin films were deposited on pyrex glass substrate using different flow rate of haxamethyldisiloxane (HMDSO) based liquid precursor with nitrogen gas as a glow discharged decomposition by plasma enhanced chemical vapor deposition (PECVD) technique. The significant influence of different precursor flow rates on refractive index and thickness of the DLN films was measured by using spectroscopic filmatrics and DEKTAK profilometer. Optical transparency of the DLN thin films was analyzed by UV-VIS-NIR spectrometer. FTIR spectroscopy, provides the information about shifted bonds like SiC2, Si-C, Si-O, C-C, Si-H, C-H, N-H, and O-H with different precursor flow rate. We have estimated the hardness of the DLN films from Raman spectroscopy using Gaussian deconvolution method and tried to investigate the correlation between hardness, refractive index and thickness of the films with different precursor flow rates. The composition and surface morphology of the DLN films were investigated by X-ray photo electron spectroscopy (XPS) and atomic force microscopy (AFM) respectively. We have analyzed the hardness by intensity ratio (ID/IG) of D and G peaks and correlates with hardness measurement by nanoindentation test where hardness increases from 27.8 μl/min to 80.6μl/min and then decreases with increase of flow rate from 80.6μl/min to 149.5μl/min. Finally, we correlates different parameters of structural, optical and tribological properties like film-thickness, refractive index, light transmission, hardness, surface roughness, modulus of elasticity, contact angle etc. with different precursor flow rates of DLN films

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Diamond-like carbon nanocomposite films

Cited by 70 publications

References 15 publications

Achieving Low Tribological Moisture Sensitivity by a-C:Si:Al Carbon-based Coating

Achieving Low Tribological Moisture Sensitivity by a-C:Si:Al Carbon-based Coating

Nanocomposite Microstructure and Environment Self-Adapted Tribological Properties of Highly Hard Graphite-Like Film

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

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