Diamond film formation using RF plasma CVD assisted by water vapor enhanced hydrogen radical source

Hiramatsu, Mineo; Yamada, Kôji; Mizuno, Etsuko; Nawata, Masahito; Ikeda, Masanobu; Hori, Masaru; Goto, Takashi

doi:10.1109/plasma.1995.531623

International Conference on Plasma Science (Papers in Summary Form Only Received) 1995

DOI: 10.1109/plasma.1995.531623

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Diamond film formation using RF plasma CVD assisted by water vapor enhanced hydrogen radical source

Mineo Hiramatsu

Kôji Yamada

Etsuko Mizuno

et al.

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Diamond film formation using RF plasma CVD assisted by water vapor enhanced hydrogen radical source

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