Diamond—Ceramic Coating of the Future

Spear, Karl E.

doi:10.1111/j.1151-2916.1989.tb06099.x

Cited by 650 publications

(82 citation statements)

References 62 publications

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“…These findings are in accord with well-established experimental observations which show that this temperature range produces the best-quality hot-filament CVD diamond [27,28] at relatively high rates, and, hence, it is this temperature range which is widely used for diamond CVD [3,5,28].…”

Section: Growth Optimizationsupporting

confidence: 90%

Point defect incorporation during diamond chemical vapor deposition

1999

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The incorporation of vacancies, H atoms, and sp2 bond defects into single-crystal homoepitaxial (1OO)(2X1)-and(11 I)-oriented CVD diamond was simulated by atomic-scale kinetic Monte Carlo. Simulations were performed for substrate temperatures from 600 "C to 1200 'C with 0.4% CH, in the feed gas, and for 0.4% to 7% CH, feeds with a substrate temperature of 800 'C.The concentrations of incorporated H atoms increase with increasing substrate temperature and feed gas composition, and Spz bond trapping increases with increasing feed gas composition.Vacancy concentrations are low under all conditions. The ratio of growth rate to H atom concentration is highest around 800-900 'C, and the growth rate to Spz ratio is maximum around 1% CH~, suggesting that these conditions are ideal for economical diamond growth under the simulated conditions.

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Section: Growth Optimizationsupporting

confidence: 90%

Point defect incorporation during diamond chemical vapor deposition

1999

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“…The flow reactor was typically operated at pressures between 2 and 10 mbar; the total flow rate was 2 slm. One percent hydrogen was added to the He carrier flow, resulting in H-atom concentrations of 1-2 X 1015 cm-3 ; they were determined using the titration reaction H + NO 2 OH + NO. The fluorescence signal as a function of NO 2 concentration exhibited a linear decrease, as shown in Fig.…”

Section: A Calibrationmentioning

confidence: 99%

“…1 This report mainly focuses on the diagnostic technique and addresses the key results. The technical relevance of these results is discussed elsewhere.1 2 Since this study was performed specifically with the aim of demon- strating the applicability and potential of two-photon laser excited fluorescence as a quantitative diagnostic tool for the investigation of gas phase effects in typical experimental diamond growth conditions, no attempt was made to produce diamond films. Hence, no substrate was included in the experimental arrangement.…”

Section: Introductionmentioning

confidence: 99%

Two-photon excited LIF determination of H-atom concentrations near a heated filament in a low pressure H_2 environment

Meier¹,

Kohse‐Höinghaus²,

Schäfer

et al. 1990

Appl. Opt.

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With respect to the investigation of low pressure filament-assisted chemical vapor deposition processes for diamond formation, absolute concentrations of atomic hydrogen were determined by two-photon laserinduced fluorescence in the vicinity of a heated filament in an environment containing H. or mixtures of H. and CH 4 . Radial H concentration profiles were obtained for different pressures and filament temperatures, diameters, and materials. The influence of the addition of various amounts of methane on the H atom concentrations was examined. Keywords: Two-photon laser-induced fluorescence, atomic hydrogen, quantitative concentration measurements, hot filament CVD of diamond.

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“…Diamond, Diamond-like Carbon, and Cubic Boron Nitride Coatings Considerable interest has been aroused in the synthesis of diamond films because of their potential applications in microelectronics, optics, and tribology (Spear, 1989). Synthesis of diamond films by a variety of CVD, PACVD, and PVD techniques has been reported.…”

Section: Coatingsmentioning

confidence: 99%

Beam Technologies for Integrated Processing

1992

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Public reporting burden for ths collectiom of information i estimated to average 1 hour per response. icluing the time for reviewing humuctiom. searching existing data solutions. gathering and maintaining the data needed. and correlating ad reviewing the collection of infonmation. 92-17504-. 04The project that is the subject of this report was approved by the Governing Board of the National Research Council, whose members are drawn from the councils of the National Academy of Sciences, the National Academy of Engineering, and the Institute of Medicine. The members of the committee responsible for the report were chosen for their special competences and with regard for appropriate balance.This report has been reviewed by a group other than the authors according to procedures approved by a Report Review Committee consisting of members of the National Academy of Sciences, the National Academy of Engineering, and the Institute of Medicine.The National Academy of Sciences is a private, nonprofit, self-perpetuating society of distinguished scholars engaged in scientific and engineering research, dedicated to the furtherance of science and technology and to their use for the general welfare. Upon the authority of the charter granted to it by the Congress in 1863, the Academy has a mandate that requires it to advise the federal government on scientific and technical matters. Dr. Frank Press is president of the National Academy of Sciences.The National Academy of Engineering was established in 1964, under the charter of the National Academy of Sciences, as a parallel organization of outstanding engineers. It is autonomous in its administration and in the selection of its members, sharing with the National Academy of Sciences the responsiblity for advising the federal government. The National Academy of Engineering also sponsors engineering programs aimed at meeting national needs, encourages education and research, and recognizes the superior achievements of engineers. Dr. Robert M. White is president of the National Academy of Engineering.The Institute of Medicine was established in 1970 by the National Academy of Sciences to secure the services of eminent members of appropriate professions in the examination of policy matters pertaining to the health of the public. The Institute acts under the responsibility given to the National Academy of Sciences by its congressional charter to be an advisor to the federal government and, upon its own initiative, to identify issues of medical care, research, and education. Dr. Kenneth I. Shine is president of the Institute of Medicine.The National Research Council was organized by the National Academy of Sciences in 1916 to associate the broad community of science and technology with the Academy's purposes of furthering knowledge and advising the federal government. Functioning in accordance with general policies determined by the Academy, the Council has become the principal operating agency of both the National Academy of Sciences and the National Academy of Engineering in provi...

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Diamond—Ceramic Coating of the Future

Cited by 650 publications

References 62 publications

Point defect incorporation during diamond chemical vapor deposition

Point defect incorporation during diamond chemical vapor deposition

Two-photon excited LIF determination of H-atom concentrations near a heated filament in a low pressure H_2 environment

Beam Technologies for Integrated Processing

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