“…Detailed information regarding electron number density, electron temperature, and electron energy distribution function (EEDF) are often used to understand physical processes in the plasma such as particle collision processes, plasma reactions, and plasma surface interactions. Therefore, accurate and reliable information about plasma parameters is critical to understand the complex plasma behavior and to optimize plasma conditions for surface modification or related processing applications (Qayyum et al, 2006a, b Various diagnostic techniques are employed for the determination of electron temperature and density, such as plasma spectroscopy (Griem, 1964;Qayyum et al, 2005b), Langmuir probe (Head and Wharton, 1965;Huddlestone and Leonard, 1965), laser interferometry, and Thomson scattering (Hieftje, 1992;Van de Sanden et al, 1992). Langmuir probe is one of the simplest and reliable techniques for obtaining information about the plasma.…”