2014
DOI: 10.7566/jpsj.83.014501
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Diagnostics of an O2–He RF Atmospheric Plasma Discharge by Spectral Emission

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Cited by 25 publications
(12 citation statements)
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“…Oxygen spectral emission records a higher intensity for argon than helium plasma due to a difference in the mechanisms of population of the 5 P oxygen state and the mismatch in energy of the excited argon and oxygen states 29 and helium and oxygen states. 34 The energy of the 5 P level and argon 4p state are very similar, and the influence of the high oxygen excited energy levels (5s, 6s, and 4d) to population of the 5 P state can be neglected (lacking of spectral emissions from the high-lying excited energy levels of atomic oxygen atom). Figure 12 shows a slow decrease in the oxygen intensity emission with the switching of the electric field (on/off) for the argon plasma and rapid response for argon plasma.…”
Section: Resultsmentioning
confidence: 99%
“…Oxygen spectral emission records a higher intensity for argon than helium plasma due to a difference in the mechanisms of population of the 5 P oxygen state and the mismatch in energy of the excited argon and oxygen states 29 and helium and oxygen states. 34 The energy of the 5 P level and argon 4p state are very similar, and the influence of the high oxygen excited energy levels (5s, 6s, and 4d) to population of the 5 P state can be neglected (lacking of spectral emissions from the high-lying excited energy levels of atomic oxygen atom). Figure 12 shows a slow decrease in the oxygen intensity emission with the switching of the electric field (on/off) for the argon plasma and rapid response for argon plasma.…”
Section: Resultsmentioning
confidence: 99%
“…The intensity of O is lower for the rst few pulses and thereaer increases. 26 This is attributed to the higher consumption of oxygen species for interactions with surface and consequent etching. Secondly, the Ha line at 434 nm and molecular OH band at 309 nm show same trends, increasing with surface temperatures and slowly decreasing with treatment times.…”
Section: Resultsmentioning
confidence: 99%
“…An example of this is can be seen at 777 nm, which was in fact an overlapping of three peaks that could not be fully resolved with the spectrometer used. These three emission peaks would be from O I with λ = 777.194, 777.417, and 777.539 nm and transitions of 3 S 5 –3 p 5 P 1,2,3 , respectively, and an upper energy level of 10.47 eV [ 43 ]. For this experiment, however, the total intensity measured at 777 nm was sufficient as this included all O I emission lines of interest.…”
Section: Methodsmentioning
confidence: 99%