Devices with Embedded Channels

Burg, Thomas P.

doi:10.1002/9783527676330.ch11

Cited by 1 publication

(1 citation statement)

References 56 publications

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“…A sustainable vacuum or well-controlled environment is required for various micro/ nanodevices to reach optimal performance and increase their lifetime. Some well-known examples are electromechanical or optomechanical micro/nanoresonators used in quartz or Si MEMS oscillators, (1) in physical resonant micro/nanosensors, (2,3) in radio-frequency filters, (4) in optical scanners, (5) in mass sensors with embedded fluidic microchannels, (6) or in quantum devices. (7) For these devices, a low ambient pressure is necessary to avoid squeeze (8,9) and slide (10) film vibration damping that can largely degrade the resonance quality factor and thus the device sensitivity, resolution, and stability.…”

Section: Introductionmentioning

confidence: 99%

Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging

Bosseboeuf¹,

Lemettre²,

Wu³

et al. 2019

Sensors and Materials

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A large set of micro-and nanodevices requires hybrid vacuum packaging at the wafer level to optimize their performance and lifetime. When the temperature of the packaging fabrication process is limited, getter films must be integrated into the packaging cavity to obtain a low and sustainable pressure. In this paper, gas generation and residual gases inside a wafer-level package, as well as the main getter alloy films and multilayers investigated previously, are reviewed. An emphasis is put on the effect of a gaseous environment on the physicochemical mechanisms involved in getter film activation and gas sorption. A large outgassing occurs during the packaging fabrication process. It produces a gas load larger than or similar to that generated during the entire lifetime of the device at room temperature. The resulting partial pressures of gases in a micropackage are quite different from those found in ultrahigh vacuum during characterization by surface analysis techniques and when getter films are used in accelerators. Consequently, in micropackages, activation and sorption steps can no longer be analyzed separately and surface oxidation and/or oxygen bulk diffusion during activation should be taken into account. It is thus recommended to use and develop complementary characterization techniques that enable the investigation of surface and bulk phenomena at various temperatures, pressures, and gas mixtures for the assessment of getter films for vacuum packaging.

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