Quality Measurement: The Indispensable Bridge Between Theory and Reality (No Measurements? No Science! Joint Conference - 1996:
DOI: 10.1109/imtc.1996.507392
|View full text |Cite
|
Sign up to set email alerts
|

Device for measurement of microobject linear dimension

Abstract: Device is intended for the experimental obtaining of intensity distribution in the section of beam diffracted from pre-grooved surface. It simulates the work of laser read-out systems as at the reproduction as in the static state. It is possible to estiimate the influence of optical system parameters on the values of reproduction-, servo-signals and sig;nal/noise ratios. This device may be used for the measuring of relief microobject dimensions as well as for lhe optimization of optical channel and optical dis… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 9 publications
(1 reference statement)
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?