2021
DOI: 10.3390/app11167422
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Development of Wireless and Passive SAW Temperature Sensor with Very High Accuracy

Abstract: A surface acoustic wave (SAW) temperature sensor with high accuracy was developed and wirelessly characterized in this work. The sensing chip with reflective delay line pattern was simulated using typical coupling of modes (COM) model and prepared by the standard photolithographic technique. Sharp reflection peaks with high signal-to-noise (SNR) were observed from the developed sensing chip operating at 433 MHz. Referring to the frequency-stepped continuous wave (FSCW)-based transceiver, planar antennas, and t… Show more

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Cited by 11 publications
(5 citation statements)
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“…Additionally, Streque et al [295] managed to fabricate a high-Q SAW resonator using an AlN/sapphire structure for wireless monitoring of temperatures up to 400 °C. Gao et al [296] presented a highsensitivity temperature measurement technique by processing SAW data via adaptive least mean square (LMS) algorithm. They reported excellent accuracy of ± 0.2 °C within a range of -30 -100 °C.…”
Section: ) Temperature Sensorsmentioning
confidence: 99%
“…Additionally, Streque et al [295] managed to fabricate a high-Q SAW resonator using an AlN/sapphire structure for wireless monitoring of temperatures up to 400 °C. Gao et al [296] presented a highsensitivity temperature measurement technique by processing SAW data via adaptive least mean square (LMS) algorithm. They reported excellent accuracy of ± 0.2 °C within a range of -30 -100 °C.…”
Section: ) Temperature Sensorsmentioning
confidence: 99%
“…SAW devices are also good candidates for pressure and temperature sensing [ 63 , 64 , 65 , 66 ]. In the Rodríguez-Madrid et al [ 66 ] study, a SAW-based pressure sensor was reported with a sensitivity of 0.33 MHz/bar, a working frequency between 10 to 14 GHz with high-order harmonic acoustic modes.…”
Section: Current Applicationsmentioning
confidence: 99%
“…Compared to the LC passive wireless sensing system, an SAW-based passive wireless sensing system can achieve much longer transmission distance due to the higher quality factor of SAW devices [13,14]. Gao et al proposed a SAW temperature sensor with an operating frequency of about 430 MHz and a detection range of −30-100 • C, which can achieve wireless transmission of 0.5 m [15]. However, the current SAW-based passive wireless sensors are mostly designed at a low resonant frequency around 433 MHz, which leads to the relatively large size of SAW devices and antenna, hindering their application in wearable devices.…”
Section: Introductionmentioning
confidence: 99%