Development of Versatile Micro Robot for Microscopic Operation (4th report)

Fuchiwaki, Ohmi; Ohta, Atsuyuki; Misaki, Daigo; Iwata, Futoshi; Usuda, Takashi; Aoyama, Hisayuki

doi:10.2493/jjspe.73.955

Cited by 1 publication

(1 citation statement)

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“…For example, spherical micro actuators developed by Karlsruhe University in the process of researching into the MiniMan series manipulating robot [3] can drive micromanipulators to accomplish multi degrees of spherical precise scan rotation, and accomplish precise micro manipulating tasks such as assembly of micro planet gears (Φ500 μm) under microscopes, separation of flower powder cells. Fuchiwaki and Aoyama also developed a spherical micro actuator that could drive a micromanipulator to accomplish the micro assembly between a micro shaft and a spindle sleeve of Φ200 μm [4]. In the process of researching on the miniature robot system for MEMS and other precise manipulations, the author carries out researches on the kinematics, vibrations and others on the spherical micro actuator [5−7].…”

Section: Introductionmentioning

confidence: 99%

Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

Zhang

Chen

2007

Front. Mech. Eng. China

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This paper develops a 30 mmx30 mmx50 mm spherical micro actuator driven by piezoelectric ceramic stacks (PZT), and analyzes its dynamic performances. First, the space coordinate relationship of the spherical micro actuator and a dynamic model are set up. Second, The RungeKutta arithmetic is used to calculate the dynamical parameters of the micro actuator; the SIMULINK module of MATLAB is used to build the dynamical simulating model and then simulate it. Third, an experimental sample of the spherical micro actuator is developed, a micromanipulator is integrated with a micro-gripper based on the sample spherical micro actuator, and the experimental research on the micro assembly is conducted between a micro shaft of Φ180 μm and a micro spindle sleeve of Φ200 μm. Finally, the characteristics of the spherical micro actuator influenced by the mass of the metal sphere of the micro actuator, driving signal frequency, friction coefficient of the contact surface between the metal sphere and the friction block of the micro driving unit are analyzed. The experimental results indicate that the rotation resolution of the micro actuator reaches 0.000 1°, the rotation positioning precision reaches 0.000 5°, and the maximum working frequency is about 1200 Hz. The experimental results validate the back rotation vibration model of the spherical micro actuator. The micromanipulator integrated by the spherical micro actuator can meet the requirements of precise micro operation and assembly for micro electro mechanical systems (MEMS) or other microelements in micro degree fields.

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Section: Introductionmentioning

confidence: 99%