Development of Ultra-Miniaturized Piezoresistive Pressure Sensors for Biomedical Applications

Gowrishetty, Usha; Walsh, Kevin M.; Aebersold, Julia; Jackson, Douglas; Millar, Huntly; Roussel, Thomas J.

doi:10.1109/ugim.2008.30

Cited by 9 publications

(6 citation statements)

References 8 publications

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“…The piezoresistive sensitivity is calculated by the coordinate transformation of piezoresistive coefficient to form P-type piezoresistors in (100) silicon. [13] The results illustrate that the transverse and longitudinal piezoresistive coefficients in P-type (100) silicon are -π 44 /2 and π 44 /2, respectively. Therefore, the design of piezoresistors are mainly determined by the position on the monocrystalline silicon sensitive diaphragm.…”

Section: Design Of Tiny Micro-pressure Sensormentioning

confidence: 88%

“…To verify the performance of the pressure sensor prepared in the present work, we have compared our test results with those in literature [13] and [16]. For this purpose, we ensure that the dimensions and ranges of the pressure sensors mentioned in the comparative references are as close as possible to the parameters of the sensors we have proposed.…”

Section: Test Of Overload Capacity Of the Micropressure Sensormentioning

confidence: 96%

“…The bulk micromachining of sensing diaphragm formed by etching on the back of silicon material makes the side wall inclined during the anisotropic etching process, resulting in the size of the sensitive diaphgram deviating from the design value [12]. The DRIE can improve the verticality of the side wall to make the sensitive diaphragm conform to the design value, but the change of diaphragm thickness may be sensitive to the nonuniformity of the etching caused by the deviation of DRIE, which will affect the nonlinearity of the sensor [13]. The combination of SOI material with DRIE process and the use of half-active Wheatstone bridge structure will be a solution to decrease the size and nonlinearity of the pressure sensor.…”

Section: Introductionmentioning

confidence: 99%

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Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Cheng

Liang

et al. 2023

Phys. Scr.

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With the rapid development of key industries such as new energy vehicles, smart homes, smart phones and consumer grade drones, the demand for high performance miniature micro- pressure sensors is also growing promptly. At prssent, most of the pressure sensors of this type adopt a C-type structure, and the thickness of the sensitive diaphragm needs to be continuously thinned in order to improve the sensitivity of this type sensor, which leads to its sensitivity to etching errors and makes it difficult to ensure the linearity of the pressure sensor. Based on this, we designed a miniature micro-pressure half active Wheatstone bridge piezoresistive pressure sensor with C-type square diaphragm structure, whose area is reduced by shortening the number of leads and pads, through ion impantation on the surface of the diaphragm to create a piezoresistors, using deep reactive ion etching (DRIE) technology to release the pressure sensitive diaphragm with length of 460 μm × 460 μm, thinkness of 7.5 μm. The buried oxygen layer in the SOI(silicon on insulator) can play a role of stopping the etching, which assures the uniformity of the released sensitive diaphragm and the non-linear errors of the sensor while maintains its sensitivity. In this paper, the influence of piezoresistor position offset on the performance of the pressure sensor is analyzed by means of simulation, which improves the accuracy of the designed model and guarantees its performance parameters can meet the design indicators. Finally, the static characteristics of the sensor is calibrated. The experimental results show that the sensitivity of the sensor is up to 0.538 mV kPa-1/3.5 V in the range of 40 kPa at room temperature, and the non-linear error is only 0.386 % FS. This study provides some new ideas and references for the design work of high performance micro-pressure sensors.

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Section: Design Of Tiny Micro-pressure Sensormentioning

confidence: 88%

Section: Test Of Overload Capacity Of the Micropressure Sensormentioning

confidence: 96%

Section: Introductionmentioning

confidence: 99%

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Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Cheng

Liang

et al. 2023

Phys. Scr.

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“…Combined with silicon fusion bonding, more complex three-dimensional structures could be produced. Doping ions were implanted into the device layer of SOI to form piezoresistors [72]. Then, the silicon handler of SOI was thinned to 150 μm, and a cavity with the vertical wall was etched by DRIE.…”

Section: Size Change With Process Developmentmentioning

confidence: 99%

Recent Progress of Miniature MEMS Pressure Sensors

Song

et al. 2020

Micromachines

150

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Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been frequently required for medical diagnosis. Miniature pressure sensors could directly measure the blood pressure and fluctuation in blood vessels with an inner diameter from 200 to 1000 μm. Glaucoma is a group of eye diseases usually resulting from abnormal intraocular pressure. The implantable pressure sensor for real-time inspection would keep the disease from worsening; meanwhile, these small devices could alleviate the discomfort of patients. In addition to medical applications, miniature pressure sensors have also been used in the aerospace, industrial, and consumer electronics fields. To clearly illustrate the “miniature size”, this paper focuses on miniature pressure sensors with an overall size of less than 2 mm × 2 mm or a pressure sensitive diaphragm area of less than 1 mm × 1 mm. In this paper, firstly, the working principles of several types of pressure sensors are briefly introduced. Secondly, the miniaturization with the development of the semiconductor processing technology is discussed. Thirdly, the sizes, performances, manufacturing processes, structures, and materials of small pressure sensors used in the different fields are explained in detail, especially in the medical field. Fourthly, problems encountered in the miniaturization of miniature pressure sensors are analyzed and possible solutions proposed. Finally, the probable development directions of miniature pressure sensors in the future are discussed.

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“…For example, Kalvesten, E. et al [8] fabricated a thin-film pressure sensor by releasing thermal oxygen sacrificial layer in a cavity with a gap of 3 µm. Gowrishetty U. et al [9] proposed a miniature pressure sensor using silicon on insulator (SOI) and deep reactive ion etching (DRIE) technologies. The pressure sensor was thinned to 150 µm without back sealing bonding.…”

Section: Of 10mentioning

confidence: 99%

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

Song

Zhang

et al. 2020

Sensors

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A miniature piezoresistive pressure sensor fabricated by temporary bonding technology was reported in this paper. The sensing membrane was formed on the device layer of an SOI (Silicon-On-Insulator) wafer, which was bonded to borosilicate glass (Borofloat 33, BF33) wafer for supporting before releasing with Cu-Cu bonding after boron doping and electrode patterning. The handle layer was bonded to another BF33 wafer after thinning and etching. Finally, the substrate BF33 wafer was thinned by chemical mechanical polishing (CMP) to reduce the total device thickness. The copper temporary bonding layer was removed by acid solution after dicing to release the sensing membrane. The chip area of the fabricated pressure sensor was of 1600 μm × 650 μm × 104 μm, and the size of a sensing membrane was of 100 μm × 100 μm × 2 μm. A higher sensitivity of 36 μV/(V∙kPa) in the range of 0–180 kPa was obtained. By further reducing the width, the fabricated miniature pressure sensor could be easily mounted in a medical catheter for the blood pressure measurement.

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Development of Ultra-Miniaturized Piezoresistive Pressure Sensors for Biomedical Applications

Cited by 9 publications

References 8 publications

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Recent Progress of Miniature MEMS Pressure Sensors

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

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