Development of technology for the formation of vacuum field emission cells using focused ion beams

This paper presents the results of theoretical and experimental studies aimed at studying the influence of the basic geometric parameters of micromechanical cantilevers on the resonant frequency of their oscillations. The dependences of the oscillation frequency on the length of the cantilever beam, obtained based on mathematical modeling are theoretically investigated by the finite element method. In experimental studies that used AFM cantilever beams, the beams were shortened stepwise by the method of local ion beam etching by focused ion beam (FIB) Ga+. After each step, the change in the resonant frequency of oscillations was monitored. It was found that the application of the FIB method allows you to accurately change the geometric parameters of the probe beams, which, in turn, allows you to change the resonant frequency of cantilever oscillations with high accuracy. During the analysis of the obtained dependences of the resonant frequency of oscillations on the geometric parameters of the beams, it was found that a decrease in the length of the cantilever from 110 to 80 μm leads to an approximately twofold increase in the resonant frequency of oscillations of the cantilever from 320 to 620 kHz. The obtained graphs of the theoretical and experimental dependencies are compared, which showed a good correlation of the results.

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Investigation of the influence of the geometric parameters of AFM cantilevers on the resonant frequency of their oscillations

Panchenko

Shandyba

Ballouk

et al. 2020

J. Phys.: Conf. Ser.

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Field emission cell with a W-cathode formed by local ion-stimulated deposition

Shandyba

Kolomiytsev

Panchenko

et al. 2020

J. Phys.: Conf. Ser.

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This article presents the results of a theoretical study of a field emission cell with a vertically oriented emitter. The field emission cell was formed based on a combination of etched methods with a Ga+ focused ion beam and local ion-stimulated tungsten deposition. The influence of the geometric parameters of the field emission cell on the electric field strength at the emitter top is estimated. It was found that a decrease in the rounding-off radius of the emitter top from 150 to 5 nm leads to an increase in the electric field strength by more than an order of magnitude from 1.28 × 106 to 16 × 106 V/cm. A decrease in the diameter of the field emission cell from 2.5 μm to 900 nm contributes to an increase in the electric field strength by 33.6 % from 3.04 × 106 to 4.58 × 106 V/cm.

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Development of technology for the formation of vacuum field emission cells using focused ion beams

Cited by 2 publications

References 6 publications

Investigation of the influence of the geometric parameters of AFM cantilevers on the resonant frequency of their oscillations

Investigation of the influence of the geometric parameters of AFM cantilevers on the resonant frequency of their oscillations

Field emission cell with a W-cathode formed by local ion-stimulated deposition

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