2016
DOI: 10.1088/1757-899x/109/1/012017
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Development of soft X-ray emission spectrometer for EPMA/SEM and its application

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Cited by 30 publications
(19 citation statements)
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“…Cryo-tomography TEM, used in molecular biology, could be introduced to nanogeoscience for examining organic-nanomaterial aggregates. Soft x-ray emission spectroscopy systems mounted within scanning electron microscopes (SEMs) and electron microprobes (EPMA) (109,110) have also been developed. This technique provides better elemental sensitivity for light elements as well as the chemical state determination of many elements.…”
Section: New Opportunities For Researchmentioning
confidence: 99%
“…Cryo-tomography TEM, used in molecular biology, could be introduced to nanogeoscience for examining organic-nanomaterial aggregates. Soft x-ray emission spectroscopy systems mounted within scanning electron microscopes (SEMs) and electron microprobes (EPMA) (109,110) have also been developed. This technique provides better elemental sensitivity for light elements as well as the chemical state determination of many elements.…”
Section: New Opportunities For Researchmentioning
confidence: 99%
“…258 Further extending the analytical capabilities of the SEM, developments in soft X-ray emission spectroscopy enable high resolution chemical state analysis at par with X-ray photoelectron spectroscopy and electron energy-loss spectroscopy, with high sensitivity for trace element detection (<100 mg·L –1 ). 259 The last 50 years have witnessed the SEM evolve from a surface imaging tool requiring tedious sample processing into a highly sophisticated, nanoanalytical powerhouse capable of being operated at low accelerating voltages and variable vacuum conditions, with a diverse selection of in situ experimental possibilities to choose from. Some novel uses of the SEM include observation of heat-induced alteration to the mineral phase of human bone, which begins to undergo recrystallisation at 600 °C, resulting in a range of crystal morphologies from spherical, hexagonal, platelets, rosettes.…”
Section: Limitations Pitfalls and Future Outlookmentioning
confidence: 99%
“…We here employ a newly developed soft X-ray emission spectrometer (SXES) attached to an electron probe micro-analyzer (EPMA), which covers a low energy range (50-210 eV) with ultra-high energy resolutions of 0.22 eV. 23,24 The unique features of SXES allow analyzing the valence electron structure of light elements, including Be, with the excellent energy resolution. Moreover, it provides a chemical state mapping that enables the visualization of two-dimensional distributions of crystallographic phases in a specimen.…”
Section: Introductionmentioning
confidence: 99%