2012
DOI: 10.1016/j.apsusc.2011.09.118
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Development of rf plasma sputtered Al2O3–TiO2 multilayer broad band antireflecting coatings and its correlation with plasma parameters

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Cited by 24 publications
(22 citation statements)
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“…The two-dimensional image of the polymer blend (without salt) and polymer blend with Ö/Na + = 8 having optimum ionic conductivity are shown in Figure 13. [85]. Now, the surface roughness value increases to about 130 nm.…”
Section: Atomic Force Microscope (Afm) Analysismentioning
confidence: 93%
“…The two-dimensional image of the polymer blend (without salt) and polymer blend with Ö/Na + = 8 having optimum ionic conductivity are shown in Figure 13. [85]. Now, the surface roughness value increases to about 130 nm.…”
Section: Atomic Force Microscope (Afm) Analysismentioning
confidence: 93%
“…Three peaks can be observed at binding energies of 529.6, 531, and 533.3 eV. The first and second peaks are attributed to lattice oxygen in Ti O and Al O bonds in TiO 2 and Al 2 O 3 , respectively [46,47]. The other peak at 533.3 eV is attributed to the oxygen in NO x [48].…”
Section: Xps Patternsmentioning
confidence: 87%
“…Many materials have been used as substrates in magnetron sputtering, including organic materials (cotton fabrics [31] and polycarbonate [18,32]), inorganic materials (glass [16,33,34] and quartz [35,36]), metals (wafers of alumina (Al 2 O 3 ) [37] zinc oxide (ZnO) [38], and stainless steel [39]), and minerals (sapphire [5]). Since the transmittance of PTFs affects the photocatalytic efficiency, materials such as glass and quartz are widely used as substrates due to their high transmittance.…”
Section: Substrate Typementioning
confidence: 99%
“…Theoretically, for a well-balanced magnetron, the power per sputtered adatom increases with increasing total sputtering power, delivering more energy to the growing film and thus improving densification. Therefore, a higher refractive index (n) means a denser film [34] and a finer film nano/micro-structure [37,68,69]. In addition, the refractive index of a transparent thin film is directly proportional to its electronic polarization, which is in turn inversely proportional to the inter-atomic separation [1].…”
Section: Sputtering Powermentioning
confidence: 99%
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