Development of QCM Humidity Sensors Using Anodized Alumina Film

Development of QCM humidity sensors using anodized alumina film

“…In recent years, there have been a number of studies on QCM humidity sensors, but the humidity‐sensitive materials used therein are primarily organic materials such as composite materials consisting of carbon nanotubes and a metal organic structure, composite materials consisting of fullerene and graphene oxide, or composite materials consisting of polyaniline and graphene oxide . In this study, we used a porous alumina film that was fabricated by anodic oxidation as the humidity‐sensitive material . We used this material because it has been conventionally used as a protective film for aluminum pots and the like, the durability of the film is superior because it is much denser than organic films such as polymerized film, it is stable at high temperatures, it is resistant to degradation caused by organic solvent vapor, and demonstrates quick response.…”