Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164)
DOI: 10.1109/robot.2001.933216
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Development of PZT and PZN-PT based unimorph actuators for micromechanical flapping mechanisms

Abstract: This paper focuses on the design, fabrication and characterization of unimorph actuators for a microaerial flapping mechanism. PZT-5H and PZN-PT are investigated as piezoelectric layers in the unimorph actuators. Design issues for microaerial flapping actuators are discussed, and criteria for the optimal dimensions of actuators are determined. For low power consumption actuation, a square wave based electronic driving circuit is proposed. Fabricated piezoelectric unimorphs are characterized by an optical measu… Show more

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Cited by 72 publications
(47 citation statements)
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“…For modeling purposes, a piezoelectric actuator can be treated as a twoport element that transduces voltage and current to force and velocity. See [17] for more details on dynamic modeling of the actuator.…”
Section: A Actuatormentioning
confidence: 99%
“…For modeling purposes, a piezoelectric actuator can be treated as a twoport element that transduces voltage and current to force and velocity. See [17] for more details on dynamic modeling of the actuator.…”
Section: A Actuatormentioning
confidence: 99%
“…They are fast, light, compact, easy to fabricate, and have low power consumption. Moreover, the simple design and fabrication method of piezoelectric unimorph actuators was most suitable for the water strider robot [8]. However, they have small motion and require high voltages.…”
Section: Design Of the Robotmentioning
confidence: 99%
“…6. Among various kinds of piezoelectric materials, Pb(Zr,Ti)O 3 (PZT-5H, Piezo Systems Inc.) is chosen [8,10]. Stainless steel is used as the elastic layer of the unimorph actuator.…”
Section: B Piezoelectric Unimorph Actuator Analysismentioning
confidence: 99%
“…This method has the benefits of not only being simple to construct, but also this structure has the ability to be driven parasitically from the body vibrations of the MFI. The second method places the haltere on the output link of a fourbar mechanism driven by a piezoelectric actuator, similar to the method used to drive the MFI wing as described in [3], [9], [11].…”
Section: Haltere Design Issuesmentioning
confidence: 99%