“…A possible strategy for achieving low ASRs at <500 °C, while maintaining good in-plane electrical conductivity for current collection and compatibility with thin-film technology, is the use of textured or epitaxial thin-film cathodes and electrolytes of low thickness . Particularly, textured or epitaxial layers offer the advantage of a well-controlled geometry and microstructure, whether for the electrolyte, cathode, or both. − The highest power loss in a μSOFC is typically due to the oxygen reduction reaction (ORR) overpotential at the cathode, and there are therefore many reports of state-of-the-art epitaxial cathode thin films. ,,, Primarily, μSOFCs have been fabricated on Si, but research has also focused on μSOFC fabrication on metal substrates to enable fast start-up times and superior mechanical stability and cyclability, ,, as discussed later.…”