2023
DOI: 10.1007/978-3-031-18318-8_29
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Development of Pressure Sensors Integration Method to Measure Oil Film Pressure for Hydrodynamic Linear Guides

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Cited by 1 publication
(6 citation statements)
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“…Thin film pressure sensors are used to measure high pressure on the order of 1 GPa but the pressure is generated in engines on the order of 10-100 MPa, a sensor with reduced and uniform strain sensitivity has been developed by optimizing the composition of copper, manganese and nickel contained in the sensor alloy [11]. However, in hydrodynamic linear guides, it is not possible to use thin film pressure sensors because of very small pressure difference of 0.5 MPa [13].…”
Section: Pressure Measurement Methods In Hydrodynamic Guidewaysmentioning
confidence: 99%
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“…Thin film pressure sensors are used to measure high pressure on the order of 1 GPa but the pressure is generated in engines on the order of 10-100 MPa, a sensor with reduced and uniform strain sensitivity has been developed by optimizing the composition of copper, manganese and nickel contained in the sensor alloy [11]. However, in hydrodynamic linear guides, it is not possible to use thin film pressure sensors because of very small pressure difference of 0.5 MPa [13].…”
Section: Pressure Measurement Methods In Hydrodynamic Guidewaysmentioning
confidence: 99%
“…Preliminary Ibrar et al [13] tested and compared various integration methods of miniature pressure sensors in a Plexiglas rail (relatively shorter in length as compared to steel rail). In Fig.…”
Section: Pressure Measurement Methods In Hydrodynamic Guidewaysmentioning
confidence: 99%
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