Development of Precision Positioning Stage

Abstract

The growing demand for positioning accuracy in machines with high speed plays an important role in achieving high productivity gain. A system that is capable to achieve both coarse (macro) and fine (micro) positioning finds a variety of applications in precision positioning. In the proposed work, a macro positioning stage is developed with a ball screw actuator and a micro positioning stage is developed with an additional gear reduction unit. The coarse and fine positioning with friction compensation is achieved and the steady state error is minimized. The developed system is controlled using a programmable logic controller and operated with human machine interface.

Frequency-Domain Data-Driven Adaptive Iterative Learning Control Approach: With Application to Wafer Stage

“…a direct influence on the product quality [2], [3], which leads to higher performance requirements for the stages , such as higher tracking accuracy, larger velocity and acceleration. In the control system of the precision motion stages, the feedback control is usually used to suppress the unstructured external disturbance and the system uncertainty, while the feedforward control is used to compensate for the orderly disturbance, such as thrust ripple [4].…”