Development of porous ZnO thin films for enhancing piezoelectric nanogenerators and force sensors

Lee, Ping Che; Hsiao, Yu Liang; Dutta, Jit; Wang, Ruey Chi; Tseng, Shih Wen; Liu, Chuan Pu

doi:10.1016/j.nanoen.2020.105702

Cited by 59 publications

(34 citation statements)

References 39 publications

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“…[5] On the other hand, porous films earn their popularity in selective separation such as in energy storage and filtration in gas and liquid purification. [6] Their dielectric, mechanical, thermal, and physical properties rely on the thickness, structure, functional groups on the film surfaces, and the surface topography from atomic to micrometer level. [7,8] Although most commercialised films look faultless to the naked eye and feel smooth to touch, few surfaces are completely flat at the molecular or atomic level.…”

Section: Introductionmentioning

confidence: 99%

A review of surface roughness impact on dielectric film properties

Song

Wang

Tan

2021

IET Nanodielectrics

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The importance of surface roughness with respect to the bulk properties of dielectric materials is often overlooked. Surface roughness or interfaces between different material layers often significantly affects the external properties of thin films. Surface roughness holds its commonalty and critical impact among many materials properties. This review summarises the recent work on the effect of surface roughness on the mechanical, thermal, physical, and dielectric properties of dielectric films. Appropriate roughness favours adhesion, filtration, biological fouling, tribological properties, and magnetic properties. Nevertheless, lower roughness generally benefits the dielectric properties of dielectric materials, with thicknesses ranging from a few nanometres to up to 50 μm. This review discusses surface roughness control and the techniques of measurement as well. It emphasises the importance and characterisation of sample surface roughness for a better understanding of the dielectric phenomenon, mechanisms, and electrical stress test setup for various dielectric films.This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

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Section: Introductionmentioning

confidence: 99%

A review of surface roughness impact on dielectric film properties

Song

Wang

Tan

2021

IET Nanodielectrics

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“…Its non−centrosymmetric crystalline fibrous zincate phase demonstrates intense piezoelectric and thermoelectric properties [13]. Thus, it has essential applications in manufacturing piezoelectric sensors [14] and temperature detectors [15]. In addition, ZnO exhibits high electron mobility and exaction binding energy (60 meV) [16], which has critical applications in the preparation of gas detectors [17] and high−efficiency UV laser emitters [18].…”

Section: Introductionmentioning

confidence: 99%

The Electronic Properties of g−ZnO Modulated by Organic Molecules Adsorption

et al. 2022

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Molecular doping is an excellent instrument to modify the electronic properties of two−dimensional materials. In our work, the structure and electronic properties of the adsorption systems of g−ZnO adsorbed by organic molecules (including Tetracyanoethylene (TCNE), Tetracyanoquinodimethane (TCNQ), and Tetrahydrofulvalene (TTF)) were investigated computationally using Density Functional Theory (DFT). The results showed that the TCNE and TCNQ, as electron receptors, doped the LUMO energy level above the valence band maximum (VBM) of the g−ZnO band structure, demonstrating effective p−type doping. The n−type doping of g−ZnO was obtained that the TTF molecules, as electron donors, doped the HOMO energy level below the conduction band minimum (CBM) of the band structure for g−ZnO. In addition, the TCNE, TCNQ, and TTF breathed additional holes or electrons into the monolayer g−ZnO, creating surface dipole moments between the g−ZnO and organic molecules, which caused work function to be adjustable, ranging from 3.871 eV to 5.260 eV. Our results prove that organic molecular doping was instrumental in improving the performance of g−ZnO−based nano−electronic devices, providing theoretical support for the fabrication of p−doping or n−doping nano−semiconductor components. The tunable range of field emission capability of g−ZnO−based electronic devices was also extended.

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“…Piezoelectric sensors have been widely applied in structural health monitoring to improve the safety and reliability of structures and to reduce life-cycle costs [ 1 , 2 , 3 ]. For this reason, the study of piezoelectric sensors including PZT [ 4 , 5 ], ALN [ 6 , 7 , 8 ], PVDF [ 9 , 10 ], ZnO [ 11 , 12 ], etc., has become a hot topic. The sensors are usually mounted on the surface of a structure or embedded into the structure to monitor its working state.…”

Section: Introductionmentioning

confidence: 99%

“…The response value of the pressure sensor was proportional to pressure, greater than 8 mΩ/psi, and the authors obtained the change of gas pressure by measuring the change of resistivity [ 33 ]. Based on these, Karina Jeronimo et al [ 34 ] discussed the effect of ZnO fillers for piezoelectric properties and Lee et al [ 11 ] analyzed the influence of the annealing temperature on enhancing the output voltage of a force sensor.…”

Section: Introductionmentioning

confidence: 99%

Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering

Cui

Yin

et al. 2022

Micromachines

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At present, piezoelectric sensors are primarily applied in health monitoring areas. They may fall off owing to the adhesive’s durability, and even damage the monitored equipment. In this paper, a piezoelectric film sensor (PFS) based on a positive piezoelectric effect (PPE) is presented and a ZnO film is deposited on a GH4169 superalloy steel (GSS) substrate using magnetron sputtering. The microstructure and micrograph of ZnO piezoelectric thin films were analyzed by an X-ray diffractometer (XRD), energy dispersive spectrometer (EDS), scanning electron microscope (SEM), and atomic force microscope (AFM). The results showed that the surface morphology was dense and uniform and had a good c-axis-preferred orientation. According to the test results of five piezoelectric sensors, the average value of the longitudinal piezoelectric coefficient was 1.36 pC/N, and the average value of the static calibration sensitivity was 19.77 mV/N. We selected the sensor whose parameters are closest to the average value for the dynamic test experiment and we drew the output voltage response curve of the piezoelectric film sensor under different loads. The measurement error was 4.03% when repeating the experiment six times. The research achievements reveal the excellent performance of the piezoelectric film sensor directly deposited on a GH4169 superalloy steel substrate. This method can reduce measurement error caused by the adhesive and reduce the risk of falling off caused by the aging of the adhesive, which provides a basis for the research of smart bolts and guarantees a better application in structural health monitoring (SHM).

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Development of porous ZnO thin films for enhancing piezoelectric nanogenerators and force sensors

Cited by 59 publications

References 39 publications

A review of surface roughness impact on dielectric film properties

A review of surface roughness impact on dielectric film properties

The Electronic Properties of g−ZnO Modulated by Organic Molecules Adsorption

Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering

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