Development of Physical Vapor Deposition Technique and Testing on Ceramics and CoCrMo Alloys
Feng-Min Lai,
Tan-Chih Chang
Abstract:In this study, TiN thin films were coated on CoCrMo alloys and ceramic samples using vacuum coating technology with high-power impulse magnetron sputtering (HiPIMS), which was followed by coating at 100 and 200 °C to a thickness of 250, 500 or 750 nm to enhance the characteristics of the coated alloys. Through X-ray diffraction measurements, scanning electron microscopy, and microscale hardness testing, the structural, morphological, and mechanical characteristics of the CoCrMo and ceramic samples coated with … Show more
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