2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2023
DOI: 10.1109/asmc57536.2023.10121105
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Development of Outlier Detection Algorithms for Sensors with Time-Varying Characteristics

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“…In [25], the focus is on finding faults in etching equipment used in Tool-to-Tool Matching (TTTM) in semiconductor manufacturing. Their approach focuses on rapid gradient shifting and deviations from the normal trend range.…”
Section: Recent Advances In Anomaly Detection (Ad) On Iot and Ad Usin...mentioning
confidence: 99%
“…In [25], the focus is on finding faults in etching equipment used in Tool-to-Tool Matching (TTTM) in semiconductor manufacturing. Their approach focuses on rapid gradient shifting and deviations from the normal trend range.…”
Section: Recent Advances In Anomaly Detection (Ad) On Iot and Ad Usin...mentioning
confidence: 99%