Development of optical MEMS CO 2 sensors

McNeal, Mark P.; Moelders, Nicholas; Pralle, Martin U.; Puscasu, Irina; Ho, W.J.; Greenwald, A. C.; Daly, James T.; Johnson, Edward A.; George, T.

doi:10.1117/12.482316

Cited by 11 publications

(16 citation statements)

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“…A similar approach has also been experimentally demonstrated by Puscasu et al [102] (as shown in Figure 18). Their devices have been used as both emitter and detector (in the manner of a bolometer) for gas detection [103] , giving a detection limit for CO 2 of 1600 ppm within a 24 mm pathlength.…”

Section: Light Sources For Ndirmentioning

confidence: 99%

“…LEDs emit greater peak power levels when operated in a pulsed mode, however for gas detection the best SNRs are found with a 50/50 duty cycle square wave modulation [103] , thus the CW power is of greater interest when the best detection limits are required. However, for applications that require very low power, such as certain portable sensors, pulsed operation may be used to give higher efficiencies.…”

Section: 0mmmentioning

confidence: 99%

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Optical gas sensing: a review

Hodgkinson

Tatam

2012

Meas. Sci. Technol.

1,311

858

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The detection and measurement of gas concentrations using the characteristic optical absorption of the gas species is important for both understanding and monitoring a variety of phenomena from industrial processes to environmental change. This article reviews the field, covering several individual gas detection techniques including non-dispersive infrared (NDIR), spectrophotometry, tunable diode laser spectroscopy and photoacoustic spectroscopy. We present the basis for each technique, recent developments in methods and performance limitations. The technology available to support this field, in terms of key components such as light sources and gas cells, has advanced rapidly in recent years and we discuss these new developments. Finally, we present a performance comparison of different techniques, taking data reported over the preceding decade, and draw conclusions from this benchmarking.

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Section: Light Sources For Ndirmentioning

confidence: 99%

Section: 0mmmentioning

confidence: 99%

Optical gas sensing: a review

Hodgkinson

Tatam

2012

Meas. Sci. Technol.

1,311

858

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“…[9][10][11][12][13][14][15][16][17][18][19][20] McNeal et al [9] developed low-cost MEMS optical gas and chemical sensors and fabricated them through conventional CMOS-compatible processes. Xu et al [10] realized a novel CO 2 -doped micro-sensor on nanocrystalline tin oxide (SnO 2 ) and copper oxide (CuO).…”

Section: Introductionmentioning

confidence: 99%

“…Although there are not many models available for CO 2 detection tailored for MH diagnosis, several models of CO 2 detectors have been implemented for other applications . McNeal et al developed low‐cost MEMS optical gas and chemical sensors and fabricated them through conventional CMOS‐compatible processes. Xu et al realized a novel CO 2 ‐doped micro‐sensor on nanocrystalline tin oxide (SnO 2 ) and copper oxide (CuO).…”

Section: Introductionmentioning

confidence: 99%

A modelling study of a new malignant hyperthermia diagnosis device

Ricardez‐Sandoval

2015

Can J Chem Eng

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This paper presents a mathematical model for better understanding of the functionality of a newly-proposed Malignant Hyperthermia (MH) diagnosis device. MH is a rare life-threatening condition that is usually triggered by exposure to certain drugs such as a volatile anesthetic agent, neuromuscular blocking agent, or succinylcholine. It is highly recommended to have this condition diagnosed immediately after its common symptoms appear. However, it is often only when the patient has had a severe or fatal reaction to anesthetic that a diagnosis is finally made. Due to this, many deaths have been reported before a patient has been diagnosed with this condition. Further for the diagnosis, the patients are subject to an expensive clinical diagnostic procedure and it is also necessary to continuously monitor the condition. In this study, a micro-total analysis system for MH diagnosis through the assessment of the end-tidal CO 2 concentration level that can also aid point-of-care testing is presented. Various model parameters of the system are considered and their effects on the behaviour of the system are assessed. The results presented in this study are based on the proposed mathematical model for the new MH diagnosis device and can be used to evaluate the device's functionality and performance prior to its manufacture.

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“…Based on the chemical or physical characteristics of the gas molecules, there are many sensing methods. For CO 2 gas sensing, methods based on chemical reaction are not appropriate, since CO 2 gas has little chemical activity, being the resultant gas after the combustion [ 1 ].…”

Section: Introductionmentioning

confidence: 99%

Enhanced Plasmonic Wavelength Selective Infrared Emission Combined with Microheater

et al. 2017

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Abstract:The indirect wavelength selective thermal emitter that we have proposed is constructed using a new microheater, demonstrating the enhancement of the emission peak generated by the surface plasmon polariton. The thermal isolation is improved using a 2 µm-thick Si membrane having 3.6 and 5.4 mm outer diameter. The emission at around the wavelength of the absorption band of CO 2 gas is enhanced. The absorption signal increases, confirming the suitability for gas sensing. Against input power, the intensity at the peak wavelength shows a steeper increasing ratio than the background intensity. The microheater with higher thermal isolation gives larger peak intensity and its increasing ratio against the input power.

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Development of optical MEMS CO 2 sensors

Cited by 11 publications

References 0 publications

Optical gas sensing: a review

Optical gas sensing: a review

A modelling study of a new malignant hyperthermia diagnosis device

Enhanced Plasmonic Wavelength Selective Infrared Emission Combined with Microheater

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