Development of non-axisymmetric aspheric ultraprecision machining using FPGA-based piezoelectric FTS

Chang, Kuo-Ming; Cheng, Wen-Tien; Liu, Yung-Tien

doi:10.1016/j.sna.2019.03.052

Cited by 11 publications

(3 citation statements)

References 29 publications

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“…FTS systems are typically designed with compliant mechanisms driven by piezo actuators [3]- [5] to provide ultraprecision feed motions of a cutting tool with high speed. Capacitive sensors with nano resolutions are widely adopted to capture the displacement information to support feedback control of FTS systems [6], [7].…”

Section: Introductionmentioning

confidence: 99%

Actuator Saturation Compensation for Fast Tool Servo Systems With Time Delays

et al. 2021

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Fast tool servo systems with high precision and high speed pose significant challenges to servo control at the nano-scale. The saturation of the control actions, time delays and system uncertainties further complicate the control challenges. To address these problems, we propose a Smith predictor based robust anti-windup scheme in this paper, such that high performance servo with nano-accuracy can be achieved in the case of saturations, time delays and model uncertainties. According to the input/output based equivalent representation, the saturation nonlinearity is transformed to the dead zone nonlinearity fulfilling a sector condition. Based on the Popov criterion, the stability conditions for the anti-windup compensator are derived, which are further formulated as an H ∞ optimization problem with robustness against model uncertainties. The effectiveness of the proposed control architecture is verified through real-time experiments, where excellent servo performance, saturation compensation and robustness are demonstrated, outperforming existing results.INDEX TERMS Nanopositioning, fast tool servo, time delay, actuator saturation, anti-windup compensation

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Section: Introductionmentioning

confidence: 99%

Actuator Saturation Compensation for Fast Tool Servo Systems With Time Delays

et al. 2021

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“…One of the key bottlenecks to achieving ultra-precision machining technology is how to obtain an accurate, stable, and reliable micro displacement by the tool or work piece during the machining process. 1 The differential-dual-drive feed system presented in this paper uses two 'macro feed motions' ('motor drive screw' and 'motor drive nut') through the same transmission of a 'rotary nut drive type' structure, which are nearly equal in speed and turn in the same direction, to obtain the 'micro feed'. As it is higher than the two high-speed 'macro motions' under the critical speed generating crawling, and 'micro action' is obtained through the rigid drive of the same 'rotation-line' rolling screw transmission vice, the unavoidable effect of the low-speed nonlinear crawling phenomenon caused by the inherent properties of traditional electromechanical servo system structures can be relieved.…”

Section: Introductionmentioning

confidence: 99%

Dynamic characteristics analysis and experimental of differential dual drive servo feed system

Zhang

Wang

et al. 2021

Proceedings of the Institution of Mechanical Engineers, Part C:

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This paper presents the design for a new differential-dual-drive low-speed micro-feed mechanism. The ‘nut rotary ball screw pair’ is the main driving component of the mechanism. The screw and nut are each driven by a servo motor and these motors rotate in the same direction at a similar speed. The nonlinear factors such as friction and backlash can lead to unstable behaviours such as stick-slip and oscillation of the feed system. We use the Euler–Bernoulli beam elements, which have axial and torsional degrees of freedom, to describe the axial and torsional vibration of the ball screw, and use the spring-lumped parameter method to analyse other components of the feed system. An electromechanical coupling dynamic model with nonlinear factors of friction and clearance is established. Through simulation analysis and experiment, the difference in response of single-drive and differential-dual-drive systems under the influence of friction and clearance is studied. The results show that the nonlinear factors of friction and clearance have an influence on the feed speed of single-drive and differential-dual-drive system, but the low-speed micro-feed performance of the differential-dual-drive system is evidently better than that of the single-drive system. In the experiment, under the condition of screw single drive and differential dual drive, the critical crawling velocities of the table are measured. The experimental results are consistent with the simulation results, which verifies that the established models are reasonable. This lays a foundation for the design and research of the controller.

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“…One of the key technical bottlenecks to realize ultra-precision machining is how to obtain accurate, stable, and reliable micro displacement by the tool or work piece during machining process. 1 Although the static reverse clearance can be reduced or even eliminated by proper preloading method, 2 the nonlinear motion caused by uncertain factors such as friction cannot be eliminated, and the nonlinear influence of friction caused by linear motion is much greater than that caused by rotating parts. 3 Therefore, in CNC machine tools, the linear motion of the table relative to the guide rail has become the main factor limiting the improvement of feed accuracy.…”

Section: Introductionmentioning

confidence: 99%

Micro feed characteristic analysis of a new crawler guide rail dual drive servo system

Zhang

Xing

2021

Science Progress

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This paper presents a new type of crawler guide rail dual drive micro feed servo system based on “crawler type” guide rail. Through the innovative design of the crawler guide rail and the change of the working mode, the table, and the crawler type movable rail are relatively static, and the influence of nonlinear friction in low-speed micro feed is eliminated, so that the system can have a lower stable speed limit and realize accurate micro feed control. The Euler-Bernoulli beam element with axial and torsional degrees of freedom is used to describe the axial and torsional vibrations of the ball screw, and the lumped parameter method is used to analyze other parts of the feed system, and the electromechanical coupling dynamic model considering the nonlinear friction is established. The transfer function block diagram is used to characterize the motion relationship of the crawler guide rail dual drive servo feed system. The response difference between the screw single drive system and the new crawler guide rail dual drive system is analyzed by simulation when feeding at constant or variable speed, and the influence of different feed speed on the dynamic performance of the system. The results show that the low speed micro feed performance of the new crawler guide rail dual drive servo system is obviously better than that of the screw single drive system under the condition of constant speed or variable speed.

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Development of non-axisymmetric aspheric ultraprecision machining using FPGA-based piezoelectric FTS

Cited by 11 publications

References 29 publications

Actuator Saturation Compensation for Fast Tool Servo Systems With Time Delays

Actuator Saturation Compensation for Fast Tool Servo Systems With Time Delays

Dynamic characteristics analysis and experimental of differential dual drive servo feed system

Micro feed characteristic analysis of a new crawler guide rail dual drive servo system

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