Development of Ni-based superalloys for microelectromechanical systems

Burns, Devin E.; Zhang, Y.; Teutsch, Michael; Bade, K.; Aktaa, Jarir; Hemker, Kevin J.

doi:10.1016/j.scriptamat.2012.06.003

Cited by 29 publications

(19 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In these cases, an additional homogenization step results in a uniform Ni-Al alloy 109,110 or a desired twophase c/c9 microstructure with the corresponding high temperature mechanical stability. 111,112 Conversion of LIGA Ni MEMS components to a Ni-rich two-phase (c-c9) superalloy microstructure via pack aluminization has recently been explored by Burns et al 113 The aluminized components showed significantly improved microstructural stability. Furthermore, the trimodal distribution of c9-precipitates resulted in marked improvements in both room and elevated temperature strength.…”

Section: Vapor Phase Aluminization Of Liga Ni Structuresmentioning

confidence: 99%

Emerging materials for microelectromechanical systems at elevated temperatures

2014

Self Cite

View full text Add to dashboard Cite

Extension of microelectromechanical systems (MEMS) into more extreme operating conditions will require a wider range of material properties than are currently available in conventional systems. Successful integration of new materials is dependent on concurrent development of compatible fabrication routes and scale appropriate evaluation techniques. This review focuses on emerging material classes that have potential to replace silicon-based MEMS in elevated temperature applications. Basic silicon mechanical properties and micromachining methods are reviewed to provide context for developing material systems such as silicon carbide, silicon carbonitrides, and several nickel-based alloys. Potential improvements in strength, thermal stability, and reliability are juxtaposed with fabrication, reproducibility, and economic feasibility issues that must also be addressed.

show abstract

Section: Vapor Phase Aluminization Of Liga Ni Structuresmentioning

confidence: 99%

Emerging materials for microelectromechanical systems at elevated temperatures

2014

Self Cite

View full text Add to dashboard Cite

show abstract

“…Hence, in recent years, a rapid increase in interest in metal matrix nanocomposites produced by electrodeposition has been observed [3]. The nickel-based alloys are widely applied as composite matrices due to their superior properties [8,9]. For example, http://dx.doi.org/10.1016/j.matdes.2015.04.049 0261-3069/Ó 2015 Elsevier Ltd. All rights reserved.…”

Section: Introductionmentioning

confidence: 99%

“…most metallic microcomponents are currently produced in the LIGA process, which involves selective electrodeposition of nanocrystalline Ni into lithographic molds. However, nanostructured nickel is generally unstable, which may lead to a rapid grain growth even at low temperatures [9]. Alloying with some metals of high melting points has been found to improve stability of that system [10].…”

Section: Introductionmentioning

confidence: 99%

Ni–W/ZrO2 nanocomposites obtained by ultrasonic DC electrodeposition

et al. 2015

View full text Add to dashboard Cite

“…Pack aluminization, which is one of several chemical vapor deposition processes in which a vapor is formed and then deposits on a substrate through chemical reactions, has been used to coat nickel parts [47][48][49] and nickel foams [46,50,51]. Here we use it to deposit a 12 lm thick, uniform NiAl coating on the woven Ni20Cr wires [45] at 1000°C for 1 h, as described in detail elsewhere [52].…”

Section: Experimental Apparatus and Proceduresmentioning

confidence: 99%