Abstract:A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe 2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the… Show more
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