2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2015
DOI: 10.1109/transducers.2015.7181209
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Development of new micro gas preconcentrator using novel electroless gold plating process

Abstract: This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300 o C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are suc… Show more

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