Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer

Yeo, Jin-Ho; Nam, Ki-Bong; Kang, Gil–Seon; Hu, Qicheng; Jeong, Chang-Young; Park, Young-Soo; Lee, Seok Jong; Jung, Jong Hwan; Lee, Seung Hyun; Cho, Deok Hyun; Kim, Mun Ja; Yoo, Jinsu

doi:10.1088/2053-1591/ac7850

Cited by 3 publications

(1 citation statement)

References 34 publications

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“…The peaks at 459.34 and 465.04 eV are attributed to oxy-functionalized Ti (Ti 4+ ) . The peak at 457.6 eV corresponds to Ti–N bonds, which are visible in both bulk TiB 2 and nanosheets. , This shows an affinity of nitrogen (N 2 ) toward titanium in TiB 2 (as explained ahead).…”

Section: Resultsmentioning

confidence: 87%

Large-Scale Synthesis of Electrochemically Active Titanium Diboride-Based Nanosheets by High-Energy Ball Milling

et al. 2023

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AlB2-type layered metal diborides have sought renewed research attention in recent years on account of their ability to yield XBenestheir quasi-two-dimensional (2D) counterparts. These quasi-2D nanostructures present exciting avenues to utilize the rich science offered by metal diborides. While a range of approaches have been developed to exfoliate layered metal diborides, the ability to obtain XBenes in a scalable manner is in its incipient stagesthis is a critical bottleneck in translating their rich nanoscience into tangible technology. In this work, we present a scalable approach that employs high-energy ball milling to exfoliate titanium diboride (TiB2) into its quasi-2D counterparts at the gram scale. We first show that milling TiB2 crystals for an optimal duration (6 h) and at a specific balls-to-powder ratio (20:1) yields multi-layer-thick nanosheets (∼5–10 nm thick). Second, by using Rietveld refinement and Raman spectroscopy, we show that the chemical integrity of TiB2 is retained to a large extent upon exfoliationthere is an associated formation of defects within the crystal structure of TiB2 that evolve with milling. Finally, we show that upon milling, the native electrochemical activity of TiB2 is enhanced by several folds. This ability to obtain nanosheets of TiB2 in a scalable manner using a high-energy ball mill bridges a critical missing link in the fast-growing science on nanoscaling AlB2-type metal borides.

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Section: Resultsmentioning

confidence: 87%

Large-Scale Synthesis of Electrochemically Active Titanium Diboride-Based Nanosheets by High-Energy Ball Milling

et al. 2023

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Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology

Choi

Nam

Shin

2023

Adv Materials Inter

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Extreme ultraviolet lithography (EUVL) is widely employed in the electronics, automotive, military, and AI computing areas for IC chip fabrication. A pellicle is a thin and transparent membrane that protects a costly photomask, known as a reticle, during the EUVL process. The fabricated IC chip can be disastrous without a pellicle. When a particle lands on a photomask, it frequently results in a faulty pattern, which leads to chip failure and lower production yield. A nanometer‐thick graphite (NGF) has demonstrated tremendous potential for addressing optical, mechanical, thermal, and chemical criteria among potential pellicle materials such as carbon allotropes, Si, SiNx, and Si‐Mo‐Nb. This review summarizes current progress in NGF pellicles, including large‐scale material fabrication (up to 135 mm × 135 mm), transfer method for freestanding form, and practical characterization methods. Current significant challenges and future opportunities for NGF pellicles are also discussed in order to facilitate a critical transition from lab‐scale research to industrial‐scale implementation.

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Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis

Günaydın,

Çetinkaya,

Torabfam

et al. 2024

Advances in Colloid and Interface Science

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Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer

Cited by 3 publications

References 34 publications

Large-Scale Synthesis of Electrochemically Active Titanium Diboride-Based Nanosheets by High-Energy Ball Milling

Large-Scale Synthesis of Electrochemically Active Titanium Diboride-Based Nanosheets by High-Energy Ball Milling

Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology

Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis

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