Development of miniaturized semiconductor flow sensors

Köhl, F.; Fasching, R.; Keplinger, Franz; Chabicovsky, R.; Jachimowicz, A.; Urban, G.

doi:10.1016/s0263-2241(02)00058-1

Cited by 67 publications

(41 citation statements)

References 12 publications

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“…To overcome the saturation, the heating power at higher flow velocity must be increased. This operating mode can be achieved by electronically controlling the heater voltage and thus the heating power in order to keep the temperature difference between the sensor and the fluid at a constant level (CTconstant temperature mode of the calorimetric flow sensor) (Kohl et al, 2003). The mean sensor temperature can be obtained from the voltage U 3 (Eq.…”

Section: Calorimetric Approachmentioning

confidence: 99%

“…This method needs one resistor which acts as heater and transducer at the same time, and, in some cases, a second resistor as sensor for the ambient temperature. This technology is known to be very sensitive regarding the flow velocity (Kohl et al, 2003). However, several drawbacks are the fragile design and the relatively expensive technology.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Hot-film and calorimetric thermal air flow sensors realized with printed board technology

Glatzl

Ćerimović

Steiner

et al. 2016

J. Sens. Sens. Syst.

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Abstract. This paper addresses the development of flow sensors optimized for heating, ventilating, and air conditioning systems. The sensors are based on the printed circuit board technology facilitating robust, flexible (in terms of layout), and cost-effective devices. Two approaches for measuring fluid quantities like flow velocity over the whole cross section are investigated in this context. The first one relies on hot-film transduction and stands out for its simplicity, but also shows some severe limitations, which can be circumvented by the second approach based on calorimetric transduction. Supported by extensive numerical simulations, several sensor embodiments were investigated and fabricated. After experimental characterization, measurement and simulation results were compared, which turned out to be in good agreement.

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Section: Calorimetric Approachmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Hot-film and calorimetric thermal air flow sensors realized with printed board technology

Glatzl

Ćerimović

Steiner

et al. 2016

J. Sens. Sens. Syst.

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“…Bei kalorimetrischen Strömungssensoren (KSS) hingegen findet eine räumliche Trennung zwischen Aktuator und Sensor statt. Im einfachsten Fall bestehen sie aus einem Heizer und zwei benachbarten Temperatursensoren, von denen jeweils einer stromaufwärts und ein anderer stromabwärts angeordnet ist, wodurch neben der Geschwindigkeit auch die Strömungsrichtung detektiert werden kann [10].…”

Section: Allgemeinesunclassified

“…Abbildung 2 zeigt eine Mikroskopaufnahme des elementarsten KSS Layouts, bei dem um einen ohmschen Heizer (H) aus Chrom zwei Thermistoren (MT 1 und MT 2 ) aus aGe symmetrisch angeordnet sind [10]. Im Sensorbetrieb ist das Bauelement in einem Strömungskanal laut Abb.…”

Section: Klassisches Layoutunclassified

Miniaturisierte thermische Fluidsensoren – Strömungs- und thermische Leitfähigkeitssensoren

Talic

Ćerimović

Köhl

et al. 2015

Elektrotech. Inftech.

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Sensoren zur Bestimmung der Eigenschaften von Flüssigkeiten und Gasen werden in vielen Bereichen der Mess-und Automatisierungstechnik zur direkten und indirekten Zustandsüberwachung eingesetzt. Dieser Beitrag stellt unterschiedliche Varianten robuster Sensoren zur Bestimmung von Strömungseigenschaften (Geschwindigkeit, Richtung und Strömungsmenge) und zur Vermessung von thermischen Materialparametern (thermische Leitfähigkeit und thermische Diffusivität) von Fluiden vor. Diese Sensoren basieren auf einem thermischen Funktionsprinzip und sind mit Mitteln der Mikrotechnologie kostengünstig herstellbar. Ausgehend von einem einzigen Basisdesign können sie als kalorimetrische Strömungssensoren oder als thermische Leitfähigkeitssensoren ausgeführt und betrieben werden. Im vorliegenden Beitrag werden die theoretischen Grundlagen erläutert und einige Anwendungsbeispiele diskutiert.Schlüsselwörter: Fluidsensorik; Kalorimetrische Strömungssensoren; Thermische Leitfähigkeit; Thermische Diffusivität Miniaturized thermal fluid sensors -Flow and thermal conductivity sensors.Sensors for the determination of fluid and gas properties are being employed for direct and indirect condition monitoring in many application areas of instrumentation and automation. This article presents various robust sensors devised to measure flow properties (velocity, direction, and mass flow) as well as thermal properties (thermal conductivity and diffusivity) of fluids. These sensors are based on a thermal operation principle and can be manufactured with cost-effective microtechnology. Starting from one generic design, they can be implemented and operated as calorimetric flow sensors or thermal conductivity sensors. This article explains the theoretical foundations and discusses several application examples.

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“…Although there is no established method for the response time measurements due to the difficulties of realizing generated defined fluidic steps [3], there are reports about measuring the response time. Some of these reports are: Sosna et al [3], Ashauer et al [5], Kohl et al [6] and de Bree et al [7]. In the first one, Sosna et al investigate an electrical measurement of thermal response time and present a model for that measurement.…”

Section: Open Accessmentioning

confidence: 99%