Development of microfabricated TiO2 channel waveguides

Abstract

An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 μm width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dB/cm

Optical temperature sensor with enhanced sensitivity by employing hybrid waveguides in a silicon Mach-Zehnder interferometer

“…Meanwhile, the corresponding FSR is 43.5 nm and the sensing range is ~56 °C. For the fabrication of the TiO 2 waveguides, one can use dry etching employing a chromium mask as demonstrated in [32]. …”

Thermal properties of TiO2films fabricated by atomic layer deposition

“…(1)(2)(3)(4). The refractive index data of TiO2 films is modeled by Wvase32 software by considering layered structure as shown in figure 1.…”

“…Thin amorphous TiO2 films are studied increasingly for sub-wavelength optical structures due to their high index of refraction, and transparency within a broad wavelength region [1][2][3]. Various techniques such as vacuum evaporation and sputtering have been investigated for the deposition of TiO2 coatings [4].…”

Fabrication of Straight Optical Waveguides Based on SnO₂ Nanomaterials

“…Several methods can be made for the manufacture of the waveguide with thin films, such as sol-gel method [10,11,12], Chemical Spray Pyrolysis [13][14][15], Chemical Bath Deposition [16], Chemical Vapor Deposition (CVD) [17].…”