Development of microelectromechanical deformable mirrors for phase modulation of light

Mali, Raji Krishnamoorthy; Bifano, Thomas G.; Vandelli, Nelsimar; Horenstein, Mark N.

doi:10.1117/1.601599

Cited by 38 publications

(7 citation statements)

References 16 publications

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“…3,4 For example, based on assumptions of moderate turbulence, near-infrared light (ϭ1.0 m), a 1-m-diam primary mirror, and a strehl ratio of 0.2, a deformable mirror would require 400 actuators, an open-loop bandwidth of 1 kHz, a stroke of 2 m, and a position resolution of 20 nm. 5…”

Section: Introductionmentioning

confidence: 99%

Continuous-membrane surface-micromachined silicon deformable mirror

et al. 1997

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The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces.

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Section: Introductionmentioning

confidence: 99%

Continuous-membrane surface-micromachined silicon deformable mirror

et al. 1997

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“…Microelectromechanical system (MEMS) foundry processes provided an economical and scalable way of producing DMs suitable for applications of adaptive optics in astronomy, vision science, laser communication, and microscopy. An enabling feature of surface micromachined DMs is that the small gaps achievable with that fabrication approach allowed the practical use of electrostatic and electromagnetic actuation [4][5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

A Design Approach to Reducing Stress and Distortion Caused by Adhesive Assembly in Micromachined Deformable Mirrors

Man

Bifano

2023

Micromachines

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A common problem in deformable mirror assembly is that the adhesion of actuators to an optical mirror face sheet introduces unwanted topography due to large local stresses generated at the adhesive joint. A new approach to minimizing that effect is described, with inspiration taken from St. Venant’s principle, a fundamental precept in solid mechanics. It is demonstrated that moving the adhesive joint to the end of a slender post extending from the face sheet largely eliminates deformation due to adhesive stresses. A practical implementation of this design innovation is described, using silicon-on-insulator wafers and deep reactive ion etching. Simulation and experiments validate the effectiveness of the approach, reducing stress-induced topography on a test structure by a factor of 50. A prototype electromagnetic DM using this design approach is described, and its actuation is demonstrated. This new design can benefit a wide range of DMs that rely on actuator arrays that are adhesively bonded to a mirror face sheet.

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“…MEMS Deformable Mirrors were first developed in the 1990s [25,26,27]. They are manufactured in batches out of layers of conducting and insulating polysilicon films and then selectively etched to form the actuators which are individually addressable through wire channels on a ceramic carrier [28]. The continuous or segmented mirror surface is coated for optical quality.…”

Section: Introductionmentioning

confidence: 99%

MEMS Deformable Mirrors for Space-Based High-Contrast Imaging

et al. 2019

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Micro-Electro-Mechanical Systems (MEMS) Deformable Mirrors (DMs) enable precise wavefront control for optical systems. This technology can be used to meet the extreme wavefront control requirements for high contrast imaging of exoplanets with coronagraph instruments. MEMS DM technology is being demonstrated and developed in preparation for future exoplanet high contrast imaging space telescopes, including the Wide Field Infrared Survey Telescope (WFIRST) mission which supported the development of a 2040 actuator MEMS DM. In this paper, we discuss ground testing results and several projects which demonstrate the operation of MEMS DMs in the space environment. The missions include the Planet Imaging Concept Testbed Using a Recoverable Experiment (PICTURE) sounding rocket (launched 2011), the Planet Imaging Coronagraphic Technology Using a Reconfigurable Experimental Base (PICTURE-B) sounding rocket (launched 2015), the Planetary Imaging Concept Testbed Using a Recoverable Experiment - Coronagraph (PICTURE-C) high altitude balloon (expected launch 2019), the High Contrast Imaging Balloon System (HiCIBaS) high altitude balloon (launched 2018), and the Deformable Mirror Demonstration Mission (DeMi) CubeSat mission (expected launch late 2019). We summarize results from the previously flown missions and objectives for the missions that are next on the pad. PICTURE had technical difficulties with the sounding rocket telemetry system. PICTURE-B demonstrated functionality at >100 km altitude after the payload experienced 12-g RMS (Vehicle Level 2) test and sounding rocket launch loads. The PICTURE-C balloon aims to demonstrate 10 - 7 contrast using a vector vortex coronagraph, image plane wavefront sensor, and a 952 actuator MEMS DM. The HiClBaS flight experienced a DM cabling issue, but the 37-segment hexagonal piston-tip-tilt DM is operational post-flight. The DeMi mission aims to demonstrate wavefront control to a precision of less than 100 nm RMS in space with a 140 actuator MEMS DM.

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Development of microelectromechanical deformable mirrors for phase modulation of light

Cited by 38 publications

References 16 publications

Continuous-membrane surface-micromachined silicon deformable mirror

Continuous-membrane surface-micromachined silicon deformable mirror

A Design Approach to Reducing Stress and Distortion Caused by Adhesive Assembly in Micromachined Deformable Mirrors

MEMS Deformable Mirrors for Space-Based High-Contrast Imaging

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