2006
DOI: 10.1016/j.nimb.2006.07.026
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Development of metallic ion beams using ECRIS

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Cited by 40 publications
(20 citation statements)
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“…The PET film of thickness 25 lm was commercially available. Implantation was performed with metal ion from volatile compound (MIVOC) source [17] for Ni + ion and an electron cyclotron resonance ion source for N + having the same energy 100 keV with varying fluence from 1 Â 10 13 to 1 Â 10 16 ion/cm 2 . During implantation the pressure of the chamber was maintained at 1.0 Â 10 À6 mbar.…”
Section: Methodsmentioning
confidence: 99%
“…The PET film of thickness 25 lm was commercially available. Implantation was performed with metal ion from volatile compound (MIVOC) source [17] for Ni + ion and an electron cyclotron resonance ion source for N + having the same energy 100 keV with varying fluence from 1 Â 10 13 to 1 Â 10 16 ion/cm 2 . During implantation the pressure of the chamber was maintained at 1.0 Â 10 À6 mbar.…”
Section: Methodsmentioning
confidence: 99%
“…These pellets were irradiated at room temperature by Ar 8+ ion beam at energy of 1.2 MeV for different ion fluences in the range 10 11 -10 15 ions/cm 2 using Low energy ion beam facility (LEIBF) of the Inter-University Accelerator Centre, New Delhi, India. The full details of this set up are discussed in the paper of Kumar et al [9][10][11]. The pellets were mounted on a ladder target inside an airtight chamber and then irradiations were started after attaining vacuum at a pressure of 1.1 Â 10 À 6 Torr.…”
Section: Methodsmentioning
confidence: 99%
“…The samples in the form of pellets were irradiated at room temperature by Ar 8 þ ion beam at energy of 1.2 MeV for different ion fluences in the range 10 11 -10 15 ions/cm 2 , using Low energy ion beam facility (LEIBF) at the Inter-University Accelerator Center, New Delhi, India. The full details of this set up are given in the paper of Kumar et al [13][14][15]. The pellets were mounted on a ladder target in an air tight chamber; the irradiations were started after attaining vacuum at 1.1 Â 10 À 6 Torr.…”
Section: Methodsmentioning
confidence: 99%