Development of Materials and Processes for Non-top Coat Immersion Lithography

Kobayashi, Katsutoshi; Sho, Kotaro; Katō, Hirokazu; Iwakaji, Yoko; Ori, Tomoya; Muto, Daizo; Azuma, Tsukasa; Ito, Shin‐ichi

doi:10.2494/photopolymer.22.619

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Static and Dynamic Contact Angle Measurements1

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2010

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“…To avoid this phenomenon, a measuring method that forcibly moves the liquid drop may be needed. 12) From these results, we considered that it is important to study a hysteresis of the dynamic contact angle and solid-surface properties.…”

Section: Static and Dynamic Contact Angle Measurementsmentioning

confidence: 99%

Immersion-Specific Defects of High-Receding-Angle Topcoat

Terai¹,

Kumada²,

Hagiwara

et al. 2010

Jpn. J. Appl. Phys.

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In this letter, a Ka-band cavity resonator using micromachining process is presented. A two-port cavity resonator is designed using the three-dimensional (3-D) design software, HP HFSS. The cavity resonator is fabricated on a Si substrate and bonded with a Quartz wafer. The resonator shows the resonant frequency of 39 GHz, the insertion loss of 4.6 dB, and the loaded quality factor (Q L ) and unloaded quality factor (Q U ) of 44.3 and 107, respectively.

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Section: Static and Dynamic Contact Angle Measurementsmentioning

confidence: 99%