Development of LVSEM-EDS Analyzer Utilizing Superconducting X-ray Detector Toward Nanometer-scale Elemental Mapping of CFRP/Adhesive Interface

Development of SEM Equipped with Superconductor X-ray Detector Toward Chemical State Nanoimaging for CFRP/adhesive Boundary

“…In order to improve the collection efficiency, the X-ray lens was installed in the system. The collection efficiency of the SC-SEM was about 10 mSr, which was about 1/10 times smaller than that of the SDDs [7]. Figure 2 shows SEM and 2D elemental mapping images of the boundary between the resin and adhesive.…”