“…The TMOS-derived membrane showed an H 2 /N 2 permeance ratio of about 500 with an H 2 permeance of 9.1 × 10 −8 mol m −2 s −1 Pa −1 , while the PrTMOS-derived membrane showed a lower H 2 /N 2 permeance ratio of 30 with higher a N 2 /SF 6 permeance ratio of 30. The precursors with methyl [23], ethyl [18,24], propyl [24,25], butyl [18,23], hexyl [1,18,[24][25][26][27], phenyl [28,29], 3-aminopropyl [23], and 3,3,3-trifluoropropyl [30] groups were investigated. Matsuyama et al [25] prepared the silica membrane via CVD using hexyltrimethoxysilane (HTMOS) as a precursor.…”