Development of Highly Sensitive Temperature Microsensors for Localized Measurements

Abstract

This paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as for optimizing their layout. These RTDs were fabricated using well-established microfabrication and photolithographic techniques. The fabricated sensors feature high sensitivity (0.3542 mV/°C), linearity and reproducibility in a temperature range of 35 to 45 °C. Additionally, each sensor has a small size with a strong potential for their integration in microfluidic devices, as organ-on-a-chip, allowing the possibility for in-situ monitoring the physiochemical properties of the cellular microenvironment.

Temperature difference measurement with using two RTD sensors as example of evaluating uncertainty of a vector output quantity

“…Using Eqs. (4)(5)(6)(7)(8)(9)(10)(11)(12) the novel description of the brigde-circuit was created. It develops a wider discussion on the resistance-to-voltage converters and their applications.…”

“…Standard platinum RTD sensors (IEC 60751) operate in the range of -200 °C to + 800 °C. They are properly driven by a current or voltage source [6]. Their resistance is measured as a voltage across two terminals with an appropriate analog front-end (AFE) circuit, with the voltage reading it is linearized for the highest accuracy.…”

Effect of Thickness Variation on the Measured Seebeck Coefficient and Power Factor in ITO–NiCr Thin‐Film Thermocouples

“…[24][25][26][27] For thermal metrology in the micro-and nanoscale, the passive nature of thermocouple sensors is advantageous compared to RTDs, which are limited by Joule heating and the increased power densities at small size scales. [28,29] A thermocouple sensor eliminates this problem as no current is flowing through it.…”

Special Issue on Novel Technology and Applications of Micro/Nano Devices and System

“…The proposed design was optimized by a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis considering the microfabrication process limitations of low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process [1]. Sousa et al [2] presented the design, fabrication and characterization of miniaturized temperature sensors based on Resistance Temperature Detectors (RTDs) with high potential to monitor the transient and long-term response about the cellular microenvironment inside an organ-on-a-chip, which will add essential information for the screening of new drugs. The authors demonstrated that the small size and good resolution of the developed miniaturized sensors allow real-time and in situ monitoring with a resolution of 0.1 • C in the range from physiological (35 • C) to hyperthermia (45 • C) temperatures [2].…”

“…Sousa et al [2] presented the design, fabrication and characterization of miniaturized temperature sensors based on Resistance Temperature Detectors (RTDs) with high potential to monitor the transient and long-term response about the cellular microenvironment inside an organ-on-a-chip, which will add essential information for the screening of new drugs. The authors demonstrated that the small size and good resolution of the developed miniaturized sensors allow real-time and in situ monitoring with a resolution of 0.1 • C in the range from physiological (35 • C) to hyperthermia (45 • C) temperatures [2]. Jusu et al [3] investigated the development of drug-encapsulated polymeric microparticles for the controlled release of cancer drugs in treatment of breast cancer.…”