Development of high conducting phosphorous doped nanocrystalline thin silicon films for silicon heterojunction solar cells application
Shrestha Bhattacharya,
Ashutosh Pandey,
Shahnawaz Alam
et al.
Abstract:We have investigated the PECVD growth of the phosphorus-doped hydrogenated nanocrystalline silicon (n-nc-Si:H) film as an electron-selective layer in silicon heterojunction (SHJ) solar cells. The effect of power densities on the precursor gas dissociation are investigated using optical emission spectra and the crystalline fraction in n-nc-Si:H films are correlated with the dark conductivity. With the Pd of 122 mW/cm2 and ~2% phosphorus doping, we observed Raman crystallinity of 53%, high dark conductivity of 4… Show more
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